Bruker Nano Surfaces Division Ships 100th DektakXT Stylus Profiler

Growth in Asia Markets Aid Rapid Acceptance as Industry Standard for Thin Film Metrology

Bruker Nano Surfaces Division (Tucson, AZ) has shipped 100 DektakXT(TM) Stylus Surface Profiling System since the product launched last April. The DektakXT features improved ease of use and the industry's best step height repeatability of better than 5 angstroms, 1 sigma. These and other performance characteristics have already made DektakXT the new industry standard for monitoring thin film deposition and etch systems in solar, FPD, HBLED, and semiconductor research.

"We are delighted to select Dektak XT as the quality control method to Jinjing's process control system," stated, Mr. Sun, Quality Manager for Jinjing Group in China, who purchased the 100th system. "The decision was made not only based on previous experience with Dektak profilers, but also because Dektak profilers are popular tools in China's solar market for both Si-based and the thin film solar industry. In addition, we are really glad to see the new features that the DektakXT offers."

"DektakXT combines the best features of ten generations of Dektak stylus profilers and adds substantial improvements in measurement repeatability, ease of use and versatility," explained Robert Loiterman, Executive Vice President and General Manager of Bruker's Stylus and Optical Metrology Business. "We are pleased with its rapid adoption as the industry standard and that its features and performance are providing our customers enhanced capabilities and value in many markets."

The DektakXT incorporates a new scanning subsystem and ë/10 optically flat reference that improves baseline stability with up to forty percent faster scan speeds, while preserving Dektak's legendary system accuracy. Equipped with Vision64(TM) software, DektakXT is the first stylus profiler to feature a 64-bit, parallel processing software architecture that greatly accelerates data acquisition and analysis. It features a new "Quick-Analyzer" mode with fast, one button analysis of such parameters as average step height and surface texture. It is also the
first stylus profiler to support a high-definition, true-color camera for enhanced resolution and image clarity of sample surfaces. Finally, DektakXT employs Dektak's unique single-sensor head design for optimum scanning flexibility and "Easy Tip Exchange" feature that enables rapid exchange of stylus tips to address a wide range of

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