Brooks Automation to Showcase Products and Support Offerings at SEMICON West from July 16 to 18, 2007

Brooks Automation to Showcase Products and Support Offerings at SEMICON West from July 16 to 18, 2007

CHELMSFORD, Mass., July 16 / / - Brooks Automation, Inc. (NASDAQ:BRKS), which helps create manufacturing efficiency for the semiconductor and other complex manufacturing industries, today announced that its industry-leading products and solutions are featured at SEMICON West at the Brooks booth (#720 South Hall, Moscone Center) in San Francisco from July 16-18, 2007.

Brooks will also be participating in several technical sessions during the show, including the featured program, "Next Generation Fab: Defining 300mm Prime", on Thursday, July 19, 8:30am-10:00am Pacific. Chris Hofmeister, Chief Technology Officer of Brooks Automation, will be featured along with other speakers from the industry.

Some key products being featured at the show are:

Jet(TM) Atmospheric Transport Platform

The Jet Atmospheric Transport Platform is an all new, highly configurable, equipment front end module (EFEM) designed for advanced semiconductor processing. Jet utilizes new, modular building blocks to optimize all phases of an OEM tool lifecycle. Building blocks such as the Jet Engine(R) atmospheric transfer system enable the industry's best Crate-to-Operate(TM) in less than one hour. The Razor(TM) atmospheric transfer robot family, with its patented motion control algorithms, direct drive technology and proprietary passive contact end effector technology enable the safest, fastest, and most reliable wafer transfer in the industry. Vision(TM) load port modules deliver high FOUP interoperability coupled with the shortest operational cycle times. All of this is possible because of the powerful, easy to use Fusion(TM) control system.

Marathon(TM) 2Q Vacuum Transfer Platform

New Marathon 2Q vacuum transfer platform is optimized for short process time, single step semiconductor manufacturing applications. With the innovative MagnaTran Quadrafly(TM) vacuum robot and SpeedLock(TM) load locks the Marathon 2Q platform sets a new benchmark for high throughput semiconductor automation equipment. The modular platform design accommodates four or six process modules while significantly reducing fab footprint requirements.

MagnaTran(R) 8 Radius

The MagnaTran(R) 8 Radius robot extends the benefits of MagnaTran 7(R) field-proven, direct drive technology to a tri-axial drive. In addition, the MagnaTran 8 Family leverages proven SCARA arm technology to provide 4 second fast swaps within a small containment diameter. Both the tri-axial drive and the dual SCARA arm have been designed to accommodate heavier payloads up to 3 Kg.

Brooks Automation CTI-Cryogenics(R) Re-Defines the Standard for PVD High Vacuum Pumping with the Release of the On-Board(R) IS XP System

Brooks' CTI-Cryogenics(R) On-Board IS(R) 8F XP cryopump has been optimized for next generation PVD processes and offers over 40% improvement of mixed gas capacity. By providing such a large improvement in capacity, PVD processes may be optimized for new technology nodes without impacting tool availability due to increased regeneration cycles. On-Board IS XP has been tested to be process transparent and is 100% compatible with the existing industry standard On-Board IS 8F PVD solution. On-Board IS 8F XP is available for new equipment immediately and is field up-gradable for the existing installed base of over 3000 On-Board IS 8F PVD pumps.

On-Board IS(R) 8F XP includes all the proven benefits of the On-Board(R) IS platform. On-Board(R) IS high pressure operation and innovative compressor design delivers 20% less run time power consumption than other systems. On-Board IS intelligent helium management distributes cooling power to each pump when needed, enabling stable vacuum performance over several years of running high heat load processes. On-Board IS intelligent helium management has enabled customers to run six (6) cryopumps on one compressor for several years in a high volume production environment without sacrificing vacuum performance.

Brooks Automation Granville-Phillips(R) Releases Optimized Micro-Ion Vacuum Measurement Solution for Implant Applications

Granville-Phillips(R) announced today the release of a Micro-Ion Implant Gauge that is optimized for Implant source and beam-line applications, and offers a 300% or more increase in gauge lifetime. Granville-Phillips worked closely with a major Implant equipment supplier to increase source-region gauge life, beamline response time and cleanliness, and address other Implant equipment process challenges to improve system performance and gauge cost-of-ownership. The Micro-Ion Implant Gauge includes Implant specific gauge baffling solutions, optimized gauge control electronics and improved thermal management that dramatically improves gauge-life performance and measurement accuracy. Major End-Users are currently evaluating the Micro-Ion Implant Gauge performance in a retrofit application and realizing greater than 300% improvement in gauge lifetime.

Brooks Automation Polycold(R) Systems Announces the Availability of the Polycold(R) PGCL for Wafer and Chamber Cooling

Brooks' Polycold(R) PGCL has been tested and qualified on a PVD process for Copper/Tantalum barrier-seed deposition. By providing a lower chuck temperature (as low as -70 deg.C), higher process thermal loads can be managed while maintaining the wafer at the required temperature. This enables better film uniformity, higher process yields and wafer throughput.

The closed loop gas chiller provides cooling of wafers and chucks using an inert gas coolant. It also eliminates problems associated with liquid chillers such as leaks into the chamber that lead to significant system down time, cost of replacement fluid, safety concerns, and process contamination. By recycling the chilled inert gas coolant, PGCL also reduces the system's Total Cost Of Ownership when compared to the operating cost of an open loop gas chiller by eliminating the cost of continuous high-purity gas supply.

Global Customer Support - "Committed to Our Customer's Success"

Brooks has continued to improve its customer support capabilities. From GUTS(R) (Guaranteed Up-Time Support) - our around the clock, around the globe support commitment - to the continued improvement of international repair capabilities, Brooks Global Customer Support (GCS) is working hard to show commitment to our customer's success. Brooks' Fixed Price Repair program has helped customers save up to eight weeks in cycle time for robot repair. TrueBlue(R) Service Agreements give customers leverage to Brooks' global infrastructure and systems knowledge which provide more options to reducing unscheduled downtime.

This year GCS is featuring an interactive upgrades station focused on a variety of upgrades designed to improve overall system performance. Each process in wafer fabrication has unique operational challenges, and GCS's portfolio of process specific upgrades can help optimize productivity and lower Cost of Ownership. GCS is also featuring a new GOLDLink(R) station with a demonstration of the GOLDLink customer website. GOLDLink is a predictive e-diagnostics tool; a virtual presence in the fab monitoring the health of the cryo pump systems 24 hours a day to ensure unscheduled downtime is minimized. Finally, GCS is hosting a puzzle contest, designed to demonstrate the time that customers can save when they utilize Brooks' support team to service Brooks' equipment. GCS is committed to expanding its broad service portfolio and continuing to help customers solve their productivity needs.

About Brooks Automation, Inc.

Brooks is a leading worldwide provider of automation solutions and integrated subsystems to the global semiconductor and related industries. The company's advanced offerings can help customers improve manufacturing efficiencies, accelerate time-to-market and reduce cost of ownership. Brooks products and global services are used in virtually every semiconductor fab in the world. For more information, visit

All trademarks contained herein are the property of their respective owners.

Source: Brooks Automation, Inc.

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