Bosch Rexroth to Showcase Drive and Control Systems for Semiconductor Production at SEMICON West 2015

Company to exhibit automation, drive and control technology for wafer handling, device fabrication and more at annual trade show

Bosch Rexroth will share its automation technology portfolio and expertise for semiconductor manufacturing at SEMICON West 2015, July 14-16 at Moscone Center in San Francisco. The drive and control company will be exhibiting in booth 1817 in the South Hall.

Rexroth will exhibit several advanced drive and control systems, including the NYCe 4000 motion control platform, the high-precision IMS-I integrated measuring system, compact PSK precision linear motion modules and Open Core Engineering machine programming platform. In addition, the company will showcase multi-technology drive and control capabilities for wafer handling as well as cleanroom structural aluminum framing products.

• The NYCe 4000 motion control system, which will be demonstrated live in the booth, combines compact and function-rich engineering for the complex requirements of today’s most advanced semiconductor tool platforms. Open software architecture and advanced hardware support extremely high-speed control loops with 32 KHz bandwidth and the ability to handle up to 120 digital and analog I/Os in parallel in real time.

• The linear motion IMS-I integrated measuring system combines highly rigid Rexroth ball rail and roller rail systems with an incremental length measuring system. It offers the measurement accuracy comparable to high-precision glass scales, making it ideal for use in external measuring systems requiring highly accurate position resolution and top repeatability.

• Combining a ball rail system and a ball screw within a compact frame, PSK precision modules are powerful, fast and precise for linear motion applications. The units achieve travel speeds of up to 96 m/minute and a positioning repeatability of up to five microns - accuracy well-suited for many semiconductor tooling requirements. These systems have an array of useful accessories including clamping fixtures and plate and strip covers.

• For the first time in the industry, Rexroth’s new Open Core Engineering programming platform allows semiconductor tool builders and end-users to develop and program custom automation and machine control functionality using high-level languages that incorporate real-time access to platforms such as LabView and MatLab. Open Core Engineering makes this possible by opening the core of Rexroth’s PLC systems, enabling new opportunities to enhance automation production workflow and flexibility.

• The Rexroth LMS Linear Motion System with LeviMotion capabilities demonstrates an advancement in linear transport that uses magnetic carriers driven by external coils to move wafers through process chambers. With the addition of magnetic levitation bearings, the entire system is completely non-contact, enabling a particle-free transport solution for virtually all load factors, precision levels and motion profiles.

Rexroth’s global application experience in the semiconductor industry equips the company to develop automation solutions for processes such as wafer production, front- and back-end of line production and circuit board assembly to help manufacturers keep their automation systems up-to-date.

The company’s overall product portfolio includes a wide range of drives for rotational servo and stepping motors, as well as a variety of direct drives, including ironless linear motors developed for the semiconductor industry. Rexroth also provides motion control systems with an open architecture, universal encoder interface and compact drives to meet users’ control needs.

For linear motion needs, Rexroth features a comprehensive selection of linear motion modules, profiled rails, runner blocks and ball screw assemblies. Precise manufacturing with compatible accuracy and preload levels makes it possible for Rexroth to provide extensive combinations and modularity in all designs. Corrosion-resistant and cleanroom-suitable models can be used for standardization across all process steps.

In addition, Rexroth has developed miniature and high-precision guides ideally suitable for the semiconductor industry. Precision modules handle the highly dynamic motion of small masses in the tiniest spaces as ready-to-install linear systems. The integrated ball screw drive with a zero-clearance nut system guarantees exceptional positioning and repetitive accuracy.

With several hundred process steps and movements in the nanometer range, semiconductor production requires utmost precision, and Rexroth’s drive and control portfolio delivers on those requirements. The company‘s global engineering and application teams provide process-specific expertise to help customers develop scalable and integrated multi-technology systems. From jerk-free slow movement to high-speed positioning, Rexroth helps semiconductor process and inspection tool manufacturers master their drive and control challenges.

Bosch Rexroth product and automation technology experts will be available at SEMICON West 2015 in booth 1817 in the South Hall.

About Bosch Rexroth:

Economical, precise, safe, and energy efficient: drive and control technology from Bosch Rexroth moves machines and systems of any size. The company bundles global application experience in the market segments of Mobile Applications, Machinery Applications and Engineering, Factory Automation, and Renewable Energies to develop innovative components as well as tailored system solutions and services. Bosch Rexroth offers its customers hydraulics, electric drives and controls, gear technology, and linear motion and assembly technology all from one source. With locations in over 80 countries, roughly 36,700 associates generated sales revenue of approximately 5.7 billion euros ($7.6 billion) in 2013. To learn more, please visit

About Bosch:

The Bosch Group is a leading global supplier of technology and services. In 2013, its roughly 281,000 associates generated sales of 46.1 billion euros ($61.2 billion.) (NB: Due to a change in accounting policies, the 2013 figures can only be compared to a limited extent with the 2012 figures). Its operations are divided into four business sectors: Mobility Solutions, Industrial Technology, Consumer Goods, and Energy and Building Technology. The Bosch Group comprises Robert Bosch GmbH and its roughly 360 subsidiaries and regional companies in some 50 countries. If its sales and service partners are included, then Bosch is represented in roughly 150 countries. This worldwide development, manufacturing, and sales network is the foundation for further growth. In 2013, the Bosch Group invested some 4.5 billion euros in research and development and applied for some 5,000 patents. This is an average of 20 patents per day. The Bosch Group’s products and services are designed to fascinate, and to improve the quality of life by providing solutions which are both innovative and beneficial. In this way, the company offers technology worldwide that is “Invented for life.” Additional information is available online at,

In the U.S., Canada and Mexico, the Bosch Group manufactures and markets automotive original equipment and aftermarket products, industrial drives and control technology, power tools, security and communication systems, packaging technology, thermotechnology, household appliances, healthcare telemedicine and software solutions. For more information, please visit,  and

Contact for Journalists:

Bosch Rexroth Corporation

Susan Strauss

2315 City Line Road

Bethlehem, PA 18017

Telephone (610) 694-8352

Fax (610) 694-8352

Godfrey Public Relations

Ginny McCreary

40 North Christian Street

Lancaster, PA 17602

Telephone (717) 393-3831

Fax (717) 393-1403

Bosch Rexroth Corporation

Corporate Communications

14001 South Lakes Drive

Charlotte, NC 28273

More from Cleaning Products & Equipment

All Topics