BOC Edwards and Aviza Technology Announce Joint Development Agreement for Atomic Layer Deposition


JDA Combines BOC Edwards' Expertise in Chemical Precursor Formulation with Aviza's ALD Hardware Technology to Enhance Utilization, Throughput and Reduce Process Cost

WILMINGTON, MASS. and SCOTTS VALLEY, CALIF. (30 October 2006)-BOC Edwards, a leading supplier of technology, equipment and support services to the electronics and microelectronics industries, and Aviza Technology, Inc. (NASDAQ: AVZA), a leading supplier of semiconductor equipment and process technologies, announced today that they have entered into a Joint Development Agreement (JDA) to develop Atomic Layer Deposition (ALD) technology for advanced semiconductor manufacturing. The collaboration will utilize BOC Edwards' expertise in chemical precursor formulation and Aviza's advanced ALD hardware technology to optimize deposition processes for high-k materials and metals.

"We are excited about this opportunity to work with Aviza, a leader in the ALD market, to develop innovative ALD solutions for next generation manufacturing processes," said Atul Athalye, Director of Technology, Electronic Materials, at BOC Edwards. "The ultimate beneficiaries of our combined efforts will be our customers, as we aim to provide them with optimized process technology that will achieve reduced cost and higher yields."

BOC Edwards' new line of Flex-ALD(TM) precursors offers superior performance, enabling the deposition of very pure thin films and extending the range of ALD compatible compounds to include heavier elements not previously available. These novel precursors can reduce the cost and improve the efficiency of ALD processes by increasing precursor utilization, providing stable and consistent delivery without decomposition or condensation, and increasing growth rates for higher throughput. The Flex-ALD precursors will be evaluated as part of the JDA with Aviza before full commercial release.

"Strategic partnerships with established technology leaders in the semiconductor supply chain is an integral part of Aviza's advanced application activities," said Helmuth Treichel, Vice President, Advanced Applications of Aviza Technology, Inc. "This partnership with BOC Edwards will support our advanced ALD film development efforts to offer a diverse set of films for multiple IC applications. We believe the combination of BOC Edwards' Flex-ALD(TM) precursors and our ALD hardware technology expertise will deliver to global IC makers added capability to incorporate in their advanced manufacturing."

Aviza offers both single-wafer and batch ALD platforms in order to meet a wide range of DRAM, flash and logic device application needs. The Celsior(TM) next-generation single wafer ALD system is specifically designed to meet stringent high-volume manufacturing and research and development requirements. Celsior(TM) features an innovative chamber, which offers increased throughput, lower chemical consumption and an extended process window-resulting in lower cost of ownership. The Verano(TM) 5500 batch ALD system is designed to process load sizes up to 100 wafers. Enabled by Aviza's patent pending Across-Flow technology, the Verano(TM) 5500 is capable of delivering process flexibility and film composition control that achieves single wafer results in a batch environment.

About BOC Edwards

BOC Edwards, a member of The Linde Group, employs around 4600 people and is a leading supplier of integrated solutions for the manufacture of microelectronic devices, including semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

The Linde Group is a world leading industrial gases and engineering company with more than 53,000 employees working in around 70 countries worldwide. Following the acquisition of The BOC Group the company has gases and engineering sales of approximately 12 billion euro. The strategy of The Linde Group is geared towards earnings-based growth and focuses on the expansion of its international business with forward-looking products and services. For more information, please see The Linde Group online at www.linde.com

Specific information on BOC Edwards can be found at www.bocedwards.com.
e-mail inquiries can be sent to info@bocedwards.com.

About Aviza Technology, Inc.

Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ Global Market (NASDAQ GM: AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at www.avizatechnology.com.

BOC Edwards Contacts

COMPANY CONTACT
Andrew Davis
+44 (0) 1293 603507
e-mail: pressandmedia@bocedwards.com

AGENCY CONTACT
Sandy Fewkes
+1-408-224-4024
e-mail: sandy@mind-write.com

Aviza Technology Contacts

CORPORATE COMMUNICATIONS
Sherrie Gutierrez
Aviza Technology, Inc.
Corporate Marketing Manager
Phone: +1 (831) 439-6382
Fax: +1 (831) 439-6223
sherrie.gutierrez@avizatechnology.com

Evelyn Tay
Aviza Technology, Inc.
Corporate Marketing Manager, Asia
Phone: +65 6556-2327 Ext. 206
Fax: +65 6556-2129
evelyn.tay@avizatechnology.com

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