Beam Delivery System suits UV excimer lasers.
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Press Release Summary:
Microtech MBD2 accommodates large-format beam delivery system modules such as turning mirror and beam splitter, both of which feature 50 x 50 mm clear aperture that allows passage of larger diameter homogenized beam without beam corner clipping. Designed for 24/7 production in industrial environments, MBD2 is vibration dampened and structurally sound. It is built on aluminum base and can be used with short-wavelength UV excimer beams including 157, 193, and 248 nm.
Original Press Release:
JPSA Launches Microtech MBD2, Industrial-Sized UV Excimer Beam Delivery System
Hollis, New Hampshire, USA - J P Sercel Associates (JPSA) introduces its new Microtech MBD2 Beam Delivery System for UV excimer lasers. While the original Microtech system has been popular with Universities and research institutions, the new MBD2 is an industrial-grade, large-format system designed for 24/7 production in an industrial environment. It accommodates JPSA's new large-format beam delivery system modules such as the new turning mirror and beam splitter, both of which feature a 50mm x 50mm clear aperture that allows passage of a larger-diameter homogenized beam without beam corner clipping. It is an especially useful system for users who have optical tables, lasers, and motion controls, and need a comprehensive (homogenized) mask imaging system.
The new MBD2 can operate at short UV wavelengths, and is designed to be compatible with all of JPSA's larger mirrors, optics, beam homogenizers, spacers, mounts, and other beam delivery system components such as variable attenuators and dual camera systems. All optics and modules can be integrated using JPSA's universal dovetail mounting system.
Vibration dampened and structurally very sound, the MBD2 is built on an aluminum base for weight and cost savings as well as being easy to ship and set up. It will nonetheless hold very tight tolerances and is intended for daily production use. It offers the user great flexibility in that it is a vacuum (VUV) system, and can be used with short-wavelength UV excimer beams including 157nm, 193nm, and 248nm. There is no grease or oil in any of JPSA's VUV beam delivery designs, and all organic materials have been removed to prevent degradation by UV radiation and consequent contamination of the optics and interior chambers. The absence of such contaminants contributes to longer optics life. JPSA's MBD2 can be purged with high-purity gases such as nitrogen.
JPSA products and services include UV excimer and DPSS laser micromachining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835. E-mail: info@jpsalaser.com.
