Batch Oven provides polyimide baking and curing.
Press Release Summary:
Model PCO2-14(TM) optimizes polyimide cure process for semiconductor wafer devices. It enables consistent, reproducible cure process for all wafers by combining Class 10 clean process operation, inert atmosphere capabilities with less than 20 ppm of oxygen, temperatures up to 350°C, and ±1% part uniformity. Oven can be networked and controlled from central location, and atmosphere data can be monitored and recorded throughout cycle.
Original Press Release:
Despatch Industries Introduces First Integrated Solution for Semiconductor Polyimide Curing
Batch Oven Combines Four Essential Functions in a Single, Compact Design
MINNEAPOLIS, July 11, 2005 - Despatch Industries today announced the introduction of its new PCO2-14(TM) Polyimide Cure solution, a clean process oven designed for polyimide baking
and curing applications. The company launched the product at Semicon West 2005, the annual semiconductor design and manufacturing conference.
The PCO2-14 optimizes the polyimide cure process for semiconductor wafer devices. It enables short cycle times and a consistent, reproducible cure process for all wafers in the product load by combining four essential characteristics in a single, compact design: clean process operation (Class 10), inert atmosphere capabilities (<20 ppm of oxygen), temperatures up to 350°C, and fast cycle times with ± 1% part uniformity.
The PCO-214 was designed to address a specific product need in package assembly, according to Bruce Lyke, Engineering and Project Manager for Standard Products. "In many semiconductor
manufacturing environments, front-end machines are being adapted for polyimide curing. This equipment is typically not suitable for polyimide curing in terms of cleanliness, inert
atmosphere capabilities, cycle time or data acquisition. Worse, they are also very expensive. We set out to design a polyimide cure solution that meets manufacturers needs, but at a much lower price point and with lower cost of ownership."
Like other Despatch thermal processing tools, the PCO2-14(TM) Polyimide Cure can be networked and controlled from a central location, minimizing the floor space required and further
improving productivity. Atmosphere data can also be monitored and recorded throughout the cycle.
About Despatch Industries
Headquartered in Minneapolis, Minn., Despatch Industries is a leading worldwide provider of thermal processing and environmental simulation solutions. Founded in 1902, closely held Despatch is a technology-driven company committed to satisfying customer needs through innovative research and development. Through its two primary product lines, Despatch and
Ransco, the company serves customers in a number of industries including semiconductors, electronic components, photovoltaics, pharmaceuticals, aerospace, automotive and industrial
materials. Visit www.despatch.com for more information.
CONTACT INFORMATION:
Marnie Vasquez
Despatch Industries
952-469-8118
