Axcelis Wins Multiple System, Follow-On Order for 'Purion M' and 'Purion XE' to Support Flash Manufacturing Ramp


BEVERLY, Mass. – Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system, follow-on order for two Purion Platform products. The order, from one of the world's leading manufacturers of FLASH devices in Asia Pacific, included both a Purion M™ medium current and Purion XE™ high energy implanter. The chipmaker already has the full Purion platform installed in their fab. The new systems will be used to support a high volume ramp of leading edge FLASH memory devices. The systems are scheduled to ship this year.



John Aldeborgh, executive vice president, customer operations, commented, "The Purion platform is ideally suited to support the high volume production needs of this leading supplier of memory devices. The Purion's common architecture provides customers exceptional process flexibility for manufacturing efficiency, and the ability to quickly ramp production to meet growing market demand for mobile products. We are excited about this opportunity to expand our installed base with this customer, and growing our Purion platform market share as memory spending increases."



The Power of Purion

The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.



About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.



CONTACTS:



Maureen Hart (editorial/media) 978.787.4266



SOURCE Axcelis Technologies, Inc.



Web Site: http://www.axcelis.com

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