Axcelis Ships Next Generation 'Purion M' Medium Current Implanter to Leading Foundry for Advanced Logic Device Manufacturing

System Delivers Industry Leading Purity, Precision and Productivity for the Sub 2Xnm Era

BEVERLY, Mass. - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has shipped the Company's new Purion M™ medium current implanter to one of the world's leading foundries. This is the third evaluation system to ship since the product was launched. The system will be used to design and manufacture next generation logic devices for the sub 2Xnm node.

The Purion M

The new Purion M medium current system utilizes Axcelis' advanced spot beam line technology coupled with the Purion 500 WPH single wafer platform. This combination provides chip manufacturers with exceptional reliability, and remarkable precision and productivity for the widest range of implant energies and doses to address applications that include the formation of precise wells, channels and source/drain junctions. In addition, the system's industry-leading energy range and beam currents enable it to be utilized for implant processes traditionally run on high energy or high current implanters, providing chipmakers with maximum manufacturing versatility and capital efficiency. The Purion M's beam line design utilizes Axcelis' patented angular energy filter and angle control system, eliminating all forms of energy contamination while ensuring the industry's most accurate dopant placement. The result is an exceptionally pure and precise implant, enabling the highest production yields. The system is part of the Company's expanding line of next generation Purion implanters, enabling high yield manufacturing of sub 16nm planar and 3-D devices. The Purion platform was designed to drive manufacturing flexibility and lower the total cost of fab operations, and features common end station architecture and spot beamline design, the industry's most advanced filtration systems, and innovative angle control and constant focal length scanning systems. The result is absolute beam purity and the most precise dopant placement possible, while ensuring the highest levels of productivity and capital efficiency.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is:


Maureen Hart (editorial/media) 978.787.4266


Axcelis Technologies, Inc.

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