Axcelis Announces Significant Penetrations for Optima HDx High Current Implanter from Two of the Worlds Largest Chipmakers

Unique Device Performance Enhancing Capability Creates Strong Demand and Order Activity

BEVERLY, Mass., July 28, 2010 -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced significant penetrations for its Optima HDx high current implanter from two of the world's largest chip manufacturers. The Optima HDx was selected because of its unique ability to improve device performance and yield in advanced transistor fabrication while ensuring the lowest cost of ownership and the highest productivity.

Mary Puma, chairman and CEO, noted "We are at the threshold of a strategic inflection point for high current implant due to significant changes in device-related process requirements. The convergence of high performance, low power and extremely small device size in today's leading edge consumer electronics has created significant new device fabrication challenges for our customers." She continued, "The Optima HDx high current implanter is the only implanter available today that addresses these issues head-on, with a simple, cost effective, performance-enhancing solution. Its powerful spot beam technology and short beamline deliver a unique set of process related advantages that make it best suited to address customers' emerging challenges.

Customers are using this technology today, with exciting results. We see a significant opportunity for market share gains in this space."

Axcelis has leveraged its expertise in beamline technology to meet the demands of next generation device fabrication. One of the biggest challenges chipmakers face today, as they strive to deliver greater functionality, higher speed, and smaller dimensions - is the issue of leakage current. The Optima HDx architecture provides a simple solution to minimize this problem that competing ribbon-beam technologies cannot replicate. Our unique solution combines maximum dose rates, inherently found in its spot beam technology, with proprietary wafer temperature control during implantation. This process, known as 'cold implant' reduces leakage and enhances the performance of the device. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly competing designs.

Existing Optima HD systems can be easily upgraded in the field to the performance levels of the Optima HDx model, complete with all the new device performance enhancing engineering technology.

About Axcelis
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is:

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