Axcelis Announces Purion Platform Showcase at SEMICON Korea 2015


Powerful Platform Quickly Gaining Momentum in Advanced Planar and 3D Device Manufacturing



BEVERLY, Mass., – Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it will showcase its Purion™ Platform of ion implanters at SEMICON Korea 2015. The event, one of the most important technology forums in the Asia Pacific region, is being held February 4-6, at the COEX Center in Seoul, Korea. It will feature over 500 companies from 20 countries and is expected to draw over 45,000 attendees.



John Aldeborgh, executive vice president of customer operations, commented, "We're pleased to attend SEMI Korea and promote the Purion platform, which is setting a new standard in ion implantation for industry leading precision, purity and productivity." He added, "In 2015, Korea is forecasted to be a top spender in fab equipment. It is exciting to participate in such a fast growing market. The Purion is rapidly gaining momentum as chipmakers see the significant technological and economic advantages it provides as they ramp production of next generation planar and 3D devices."



Axcelis Purion Showcase:

Visit the Axcelis Purion Showcase at Booth #5606 in Hall D to learn firsthand about the technical and manufacturing breakthroughs of the industry's first complete implant platform designed specifically for advanced 3D devices. The platform includes the Purion M™ mid current implanter, the Purion H™ high current implanter and the Purion XE™ high energy implanter.



SEMI Technology Forum:

The Company will also be presenting at the SEMI Technology Forum:

Session 2: Advanced Process Technology

Implant Damage Engineering for Advanced Device Fabrication

Presented by KyungWon Lee, Axcelis Technologies

Wednesday, February 4, 2015

Room: #308, Conference Room (South), COEX

For more info or to register, visit: http://www.semiconkorea.org/ko/node/2426



About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.



CONTACTS:

Maureen Hart

(editorial/media)

978.787.4266



Doug Lawson

(investor relations)

978.787.9552



SOURCE Axcelis Technologies, Inc.



Web Site: http://www.axcelis.com  

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