ARC®29A Anti-Reflective Coating for 65nm Node ArF Processing
Rolla, Missouri, July 11, 2006 - Brewer Science, Inc. - Brewer Science continues to deliver on its twenty-five-year promise to provide solutions to our leading-edge customers by releasing ARC®29A anti-reflective coating, a high-performance coating that improves process flexibility through its compatibility with a broad range of photoresists.
This coating, used for ArF (193nm) processing, features:
o applications in manufacturing 110nm, 90nm, and 65nm node devices
o second-minimum reflectivity at 78nm
o 6-month shelf life at 21°C
o universal ArF photoresist compatibility
o broad applications as a universal bottom anti-reflective coating, and front- and
back-end via-fill applications
ARC®29A anti-reflective coating has been designed for optimal reflectance at the second minimum. With ARC29®A anti-reflective coating, the user gains broad resist compatibility, better thickness control, better topography coverage, and expanded depth of focus.
The ARC®29A coating layer will increase process control by reducing the CD swing effect by normalizing the substrate topography.
Brewer Science, a multidivisional technology company, has pioneered industry-enabling innovations from ARC® anti-reflective coatings to ProTEK(TM) etch protective coatings. Brewer Science is a major producer of high-quality material, process, and machine solutions that meet the stringent requirements of today's IC, compound semiconductor, MEMS, and optoelectronic industries. The company's family of products includes ARC® anti-reflective coatings for state-of-the-art photolithography applications; novel specialty materials for MEMS and optoelectronics; prototype coating services; Cee® bench-top spinners, coaters and hot plates; and TALON(TM) track systems for wafer processing.
Under the leadership of Dr. Terry Brewer, president and founder, Brewer Science continues to develop innovative technologies, reliable products, and responsive services, each attuned to the specific needs of individual customers. Further information on the technology and Brewer Science products can be found at www.brewerscience.com.
Contact information:
Anne Lindgren
alindgren@brewerscience.com
+ 1.573.364.0300
