All-Metal Gasket Filter protects high-purity components.
Press Release Summary:
GasShield Gasket Filter is compatible with inert and specialty gases and provides filtration in gas flows as low as 1 slpm. It protects particle-sensitive gas control components and withstands extreme operating conditions. Unit fits inside ¼ in. face seal fittings, porous element is 1 in. long, and it can be installed without design change to gas delivery system. All-metal filter, available in NanoMetal® Nickel Media, provides 0.003 µm filtration.
Original Press Release:
Mott's GasShield® Gasket Filters Protecting High Purity Components in Low Flow Gas
FARMINGTON, CT [January, 2004 - Achieving 9 LRV particle filtration in extremely low flow environments is an ongoing challenge for the semiconductor manufacturers. In many instances, particle problems emerge after a gas delivery system has been designed & installed. Mott Corporation offers a filtration product that can be installed with virtually no design change to the gas delivery system. In addition, this product can be used to protect particle-sensitive gas control components like regulators and mass flow controllers without adding length to the gas panel or gas stick.
Mott's unique GasShield Gasket Filter is compatible with both inert and specialty gases and provides precise filtration in gas flows as low as 1 slpm. Small but rugged, Mott's GasShield Gasket Filters are built to withstand extreme operating conditions and deliver optimum filtration performance.
The GasShield Gasket Filter fits inside ¼" face seal fittings and the porous element is 1" in length. This all-metal filter is available in Mott's patented NanoMetal® Nickel Media and provides true 0.003µm filtration (greater than 99.9999999% (9 log) particle removal measured at the most penetrating particle size). The Gasket Filter comes complete with integral face seal gasket. It is recommended for applications with temperatures up to 450°C (for inert gas) and a maximum differential pressure of 1000 psid (at 20°C).
Mott's High Purity Division manufactures all-metal gas filters and systems in configurations ranging from 1 slpm to 200,000 slpm. Materials of construction include nickel, 316LSS and Hastelloy® which provide highly efficient filtration for processes used in the production of integrated circuits.
Mott Corporation has been dedicated to the development, application and refinement of porous metal media since 1959. It consists of two divisions; the High Purity Division which produces filters for semiconductor quality gases and the Industrial Division which produces large chemical filtration systems and specialty porous devices.
For additional information regarding Mott Corporation and it's products, please feel free to contact Jeff Morrow, Director of Marketing, 84 Spring Lane, Farmington, CT 06032, Phone: 860-747-6333 / Toll Free 1-800-BUY-MOTT / E-Mail: QUEST@Mottcorp.com or visit our website at www.mottcorp.com.
