Abatement System suits compound semiconductor processes.
Press Release Summary:
Featuring 6-inlet head, combustion-based Spectra-G(TM) is capable of treating all exhaust gases generated by MOCVD production tools and uses exhaust gas itself as primary fuel source. High velocity air flow transports heat and combustion products out of system, completely eliminating need for water and treatment facilities. Oxide particles can be removed from air stream by filtering or central scrubber.
Original Press Release:
BOC Edwards Introduces Spectra-G(TM) Abatement Solution for Compound Semiconductor Processes
WILMINGTON, MASS. (20 June 2007)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today the release of the Spectra-G(TM) exhaust abatement system. Two models are available, the SG800 and SG3000. The Spectra-G exhaust abatement system is specifically designed as a high-performance, cost-effective and environmentally-friendly abatement solution for compound semiconductor MOCVD processes that include high flows of hydrogen and ammonia.
The Spectra-G exhaust abatement system is a large scale, combustion-based abatement system capable of treating all exhaust gases generated by MOCVD production tools. A six inlet head and high flow capacity allow it to handle exhaust for multiple process tools. Fuel cost is minimized due to the system's use of the exhaust gas itself as the primary fuel source. Careful management of the combustion process minimizes the formation of undesirable NOx. A high velocity air flow transports heat and combustion products out of the system, completely eliminating the need for water and treatment facilities. Oxide particles can be removed from the air stream by filtering or a central scrubber.
"The Spectra-G exhaust abatement system is an innovative solution for handling the hydrogen and ammonia-laden MOCVD exhausts from GaN tools," said Mike Czerniak, product marketing manager, BOC Edwards. "We've experienced a fairly spectacular entry into the market; we have sold multiple systems to one of the world's leading LED manufacturers, and this has been followed with additional sales to a leading manufacturer in Asia."
The Spectra-G exhaust abatement system is suitable for all nitride-based MOCVD applications. The high flow capacity allows it to process exhaust from up to six tools simultaneously. Dedicated inlets for each tool keep exhaust streams separated until they are introduced into the combustor. Both models of the Spectra-G exhaust abatement system are available now.
About BOC Edwards
BOC Edwards is a leading supplier of integrated solutions for the manufacture of
microelectronics devices, including semiconductors and flat panel displays. It is
also a world leader in vacuum technology for industrial, scientific, process, and
R&D applications. BOC Edwards employs around 4,000 people globally, in the
design, manufacture and support of high technology vacuum equipment. BOC
Edwards invented the concept of the commercial oil-free 'dry' vacuum pump and
now supplements this with a wide range of other pumping technologies as well
as related products and services.
