Z-Tip-Tilt Nanopositioning Stage for Precision Alignment is Ultra-low Profile, Fast, Precise, and Maintenance-free with Air Bearings

Cleanroom-compatible, this high performance noncontact positioner is well-suited for wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and µ-LED manufacturing.

April 2021, Auburn, MA – PI’s air bearing motion product line is expanding. The new A-523 Z-Tip-Tilt low profile nano-positioning and alignment stage is based on a frictionless motion concept with air bearings and ironless 3-phase linear motors. The parallel-kinematics design with 3 linear motors and high-resolution linear encoders (1nm) combines high accuracy and force capacity with an ultra-low profile. The compact format provides a rotation range up to 2° in theta-X / theta-Y and 5mm vertical (Z travel) range with excellent dynamics (up to 1g acceleration). The 250mm diameter (10”) platform can carry loads of 8kg (~18lbs), while the low profile of only 60mm (2.4”) keeps the center of gravity down, a great advantage in dynamic applications. The A-523 can be combined with the A-361 X-Y-θ Air Bearing Alignment Stage to form a very compact and low profile 6-axis precision motion system.

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Working with You

PI’s in-house engineered solutions have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of proven motion technologies and methodologies, PI is in the position to quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of your application from sensors and piezo transducers to microscope nano-focus units, fast photonics alignment systems to multi-axis automation sub-systems.

About PI

PI is a privately held company that designs and manufactures world-class precision motion and automation systems including air bearings, hexapods and piezo drives at locations in North America, Europe, and Asia. The company was founded 5 decades ago and today employs more than 1300 people worldwide. PI’s customers are leaders in high-tech industries and research institutes in fields such as photonics, life-sciences, semiconductors, and aerospace.

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