Vacuum Pump Inlet Traps Protect Atomic Layer Deposition Tools

A full line of vacuum pump inlet traps that can be customized by users to protect the vacuum pumps and lines on atomic layer deposition (ALD) tools from particulates and unreacted precursors is available from MV Products of North Billerica, Massachusetts.

MV Vacuum Inlet Traps for ALD processes can be easily customized by users to remove all process byproducts from precursors such as TMA, TiCl, DeZ, and H2S including particulates and unreacted precursors. Suitable for the manufacturing of ICs, MEMS, LEDs and OLEDs, optics, displays, batteries, and more, these stainless steel traps are offered in sizes for protecting vacuum pumps and lines with flow rates from 25 to 2000 CFM.

Available for both research and production applications, MV Vacuum Inlet Traps for ALD processes Traps range from 4” to 16” dia. with port sizes from NW-25 to ISO-160 and use interchangeable filter elements. Filter types include stainless steel gauze for particle filtration, activated charcoal for unreacted cursor adsorption, Sodasorb® for acid neutralization, and Sulfatreat® for H2S neutralization.

MV Vacuum Inlet Traps for ALD processes are priced from $249.95 to $4,799.00, depending upon configuration. Price quotations are available on request.

For more information contact:

MV Products, Division of Mass-Vac, Inc.

David Rolph,

Vice President Sales

247 Rangeway Rd. / P.O. Box 359

No. Billerica, MA 01862

(978) 667-2393

FAX (978) 671-0014

e-mail: drolph@massvac.com

www.massvac.com

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