Successful Plasma-Therm Semiconductor Processing Workshop at Korea Advanced Nano FAb Center
St. Petersburg, Florida – Plasma-Therm’s advanced plasma processing workshop, held at KANC (Korea Advanced Nano Fab Center), attracted nearly 100 engineers and researchers from 25 companies and institutes. Topics spanned the fundamental and advanced technology used in semiconductor device fabrication, materials research, and nanotechnology. Workshop attendees from disciplines as diverse as MEMS, LEDs, power, photonics, and nanotechnology participated in the full day event. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held more than a dozen one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.
Mr. H. K. Sung, KANC Facility and Process Director, offered that “KANC was pleased to host this event. It provides important background and foundation for students and facility users involved in processing. Considering the different levels of experience of attendees, it is unusual to have this type of content presented in such an organized structure and in a way that is instructional for all those that attended. This type of program is very consistent with our mission of delivering key support to Korea’s nanotechnology and compound semiconductor development.”
Dr. David Lishan, Principal Scientist and the workshop organizer, commented, “These workshops fill an education gap. The practical aspects of semiconductor fabrication and in particular plasma processing are often omitted in curriculum in favor of device design and physics. Facility users at universities and institutes frequently rely on engineering staff to develop standard processes and as a result, researchers, without the hands-on understanding of the plasma processing fundamentals, are constrained in their research efforts. Researchers are enthusiastic about gaining insight into the world of plasma processes. We are very pleased to support KANC, a long term customer and important, pivotal member of Korea’s research network. KANC’s efforts along with the local outstanding support of our S. Korea representative, Semi-ence made the event successful.”
About Korea Advanced Nano Fab Center
KANC was established to promote the development of nano and compound semiconductor technologies in 2003 by the Korean government and Gyeonggi Provincial government as a national core RD and support infrastructure. The state-of-the-art fabrication facility was completed in 2006 and the platform supports a network of over major 30 domestic and international industrial, academic, and research institutes. KANC is providing key programs in education, basic and applied R&D, startup/venture business incubation environment, and foundry capability. With cleanroom facility for device processing, characterization, and analysis, KANC plays a vital role as a national hub for nanotechnology and compound semiconductor research and development.
About Plasma-Therm
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm for the last 14 years for their products and service with VLSIresearch awards. Sales and service locations throughout North America, Europe and Asia Pacific, meet the diverse needs of Plasma-Therm’s global base of over 600 customers. For further information please visit www.plasmatherm.com.
