Soluris Named "Five Star Supplier" by VLSI Research Customer Satisfaction Survey


Soluris is one of only three companies to achieve five stars in all categories of a new star rating system derived from VLSI Research's Customer Satisfaction Survey.

Concord, MA USA-October 26, 2005-Soluris, a manufacturer of metrology systems for semiconductor manufacturing, announced today that it has received a five star rating from VLSI Research based on VLSI's 2005 Customer Satisfaction Survey.

This is the first year of the star rating system where companies are rated on a scale from one to five stars based on their results from the annual customer satisfaction survey. Of sixteen companies to receive a five star overall rating, only Soluris and two other suppliers received five stars in each of six subcategories, which are cost of ownership, quality of results, product performance, customer service, technical leadership, and commitment to the customer.

"A five star rating is given to the companies rated among the highest overall in the industry, based on the survey results" stated Risto Puhakka, President of VLSI Research. "Soluris' ability to achieve five stars in each of the six subcategories shows a strong commitment in both products and services, which is rare."

"We are grateful to our customers for giving us the high marks that they have year after year on the customer satisfaction survey," said Paul Knutrud, technical marketing manager at Soluris. "We are truly a customer focused company, and this is demonstrated by the survey results and comments from those who operate our systems and interact with us on an individual basis."

The Soluris product family is technically unique. The IVS 155(TM) optical overlay and CD metrology system provides unsurpassed performance, flexibility, and reliability. The Yosemite(TM) SP-1000 is the only CD-SEM to combine Critical Shape Metrology(TM) and Ultra Low Voltage. The IVS 155 and Yosemite CD-SEM both deliver the lowest cost-of-ownership in their classes.

About the VLSI Research

The VLSI Research, Inc findings were based on surveys returned by semiconductor equipment users around the world. Users of chip-making equipment were asked to anonymously rate their suppliers on a ten-point scale among 13 categories that characterize a supplier's relationship with its customers. These categories include seven measures of equipment performance and six measures of customer service. For more information about the VLSI Research star ratings, please go to: www.vlsiresearch.com

About Soluris
Soluris Inc., headquartered in Concord, MA, USA, has supplied instrumentation for optical and electron metrology since 1980. With offices in North America, Europe and Asia, and a large international installed base, Soluris has the global reach and expertise to support installations worldwide. The group has been selected as a 10 BEST supplier of process diagnostic equipment in VLSI Research's Customer Satisfaction Survey in the last six years, including the #1 position for the last three years. With the introduction of the Yosemite CD-SEM, which won an R&D 100 award last year, Soluris has positioned itself as an innovative technology leader in next-generation model-based metrology. More information is available at www.soluris.com.

Contact: Paul Knutrud, Soluris Inc., +1 978-318-4041, pknutrud@soluris.com

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