Single-Probe Capacitive Gauges for Nanometrology Applications


Auburn, MA, PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, introduces the D-510 family of PISeca(TM) capacitive displacement gauges.

PISeca(TM) capacitance gauges perform high-precision, non-contact measurements of geometric quantities representing displacement, separation, position, length or other linear dimension against any kind of electrically conductive target. These single-probe nanometrology sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements.

Features & Advantages
o Absolute, Non-Contact Measurement of Distance / Motion / Vibration
o Sub-Nanometer Resolution, Measuring Ranges to 500 µm
o Excellent Measuring Linearity to 0.1 %
o Plug & Play: Easy Setup and Integration
o Very Temperature Stable
o Bandwidth to 10 kHz
o Proprietary Electrode Design & Electronics Provide Higher Linearity
o All Systems Factory Calibrated for Highest Possible Linearity / Accuracy

Higher Linearity through Guard-Ring Capacitor and ILS Electronics
Not all capacitive sensors are created equal. Because the sensor design has a strong influence on the linearity, PI uses a special guard-ring electrode to shield the sensor electrode from boundary effects. This ensures a homogeneous electric field in the measurement zone and results in higher measuring linearity. In addition, the sensor signal conditioning electronics are equipped with the PI proprietary ILS linearization circuit.

Easy Setup / Sensor Installation
The capacitive gauges are plug and play units. The cable plugs directly into the sensor head for easy installation or replacement in the field. Installation is further facilitated by a display in the sensor electronics that indicates the optimum distance between probe and target.

Multichannel Measurements, Closed Loop Motion Control Electronics
PISeca(TM) capacitive sensor systems can be operated in multichannel configurations and combined with nanopositioning actuators for nanometer precise closed-loop motion control applications.

About PI
PI is the industry leader in ultra-precision motion control devices for nanoscale manufacturing, test and research applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 400+.

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