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Original Press Release

SINANO/Chinese Academy of Sciences (SUZHOU) and Plasma-Therm Host Plasma Processing Technical Workshop

Press release date: Nov 20, 2012

St. Petersburg, Florida - Plasma-Therm has provided an advanced plasma processing workshop at Suzhou Institute of Nano-tech and Nano-bionics Chinese Academy of Sciences (SINANO CAS). Both fundamental and advanced plasma etching and deposition technologies, used primarily in semiconductor device fabrication and materials science research, are presented. The workshop was hosted by the Nanofabrication Facility (NFF) of SINANO, which offers processing capability for research projects of other departments within SINANO and provides services for local companies' R&D, training technicians for state and local enterprises acting as an incubator for the micro/nano optoelectronic industrial base in Suzhou City. The workshop attracted over 130 attendees that included graduate students, facility staff, post-doctoral researchers and engineers from many local universities, institutes as well as from local technology companies. Attendees are involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as MEMS, biosensors, graphene research and optoelectronic devices. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held a dozen similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.

Prof. Jianjun Zhu, at the SINANO NFF reported, "The Plasma-Therm Plasma Processing workshop was informative and substantial, which is very valuable for students and engineers in the academic and industrial technology communities. The course was well arranged, covering the basics of plasma knowledge, dry etch and deposition processes and principles, with intuitive and deep explanations. Although I have little experience on semiconductor processing line, the workshop showed me an impressive picture of how to utilize the magic power of plasma in device fabrication. The presentations gave me as well as many other attendees a clear view of the processing III-V and Si-based devices. I look forward to incorporating concepts and to future workshops."

"The attendance for a weekend technology workshop event was very impressive and is indicative of the interest in plasma processing technology" explained Dr. David Lishan, Plasma-Therm Principal Scientist and organizer of the workshop series. "Participants come from a wide background. It is rewarding to present material to such an audience and challenging to make plasma processing concepts accessible. With these events, Plasma-Therm gains better insight into research directions and researchers are able to better utilize their plasma equipment and improve their process results."

About Suzhou Institute of Nano-tech and Nano-bionics (SINANO), Chinese Academy of Sciences (CAS)
SINANO CAS, jointly founded by the CAS, the government of Jiangsu Province and the government of Suzhou city is located in the Suzhou Industrial Park. It was established to carry out fundamental, strategic, prospective research in relative fields, aiming at internationally technological advancement, national strategic demand and future industrial development. As a public technical platform and national scientific institute, SINANO provides structure and leadership to advance modern manufacturing industry and high technological industry. The vision of the Nanofabrication Facility is to become a world leading nano-science research and technology transfer platform.

SINANO combines nanometer technology with subjects such as information science, life science, physics and chemistry. This cross discipline approach supports the transition from microelectronic technology to nanometer electronic technology and helps develop intelligent microscopic medical diagnosis system and microscopic therapy technologies. By focusing on innovation, training, cooperation between relative universities, and establishing research teams, the center fosters the development of a wide range of specialists and international scientific interaction.

The NFF includes multiple laboratories for device and nanoscale fabrication, customized-instrument development, device reliability and failure analysis, and device testing and packaging. Supplementary hardware/software systems are available for scientific research and products development in electronic, optoelectronic, MEMS, bio-sensor, and bio-chip devices.

About Plasma-Therm
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication. They offer leading etching and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe and Asia- Pacific, meet the diverse needs of Plasma-Therm's global customer base. For further information please visit