Sierra's Smart-Trak 50 Series Mass Flow Controller Now Available in 316 Stainless Steel & for Higher Flows to 200 slpm

Monterey, CA - Sierra Instruments, a global leader of flow instrumentation, now offers a 316 stainless steel version of its award-winning Smart-Trak® 50 Series in 316 Stainless Steel and with an expanded flow range up to 200 slpm.

Sierra's new 200 slpm gas mass flow controller is designed for OEMs who require higher mass flow control capability and advanced performance at a price point that meets their budgetary constraints. And if price is still a concern, the Aluminum version for the 50 Series can reduce the price more.

The 50 Series builds on the same core sensor, LFE and valve technology found in Sierra's flagship Smart-Trak 100 Series, all backed by Sierra's trademark personalized customer support. The 50 Series has a standard accuracy of +/- 1.5% of full scale that works for nearly all common semiconductor purge and carrier gases. A flexible and powerful direct-acting frictionless-hovering control valve sets it apart from the competition by minimizing leak-by, while offering +/- 0.25% repeatability.

It is the Sierra philosophy that only the highest performing core sensor technology can produce an excellent MFC. In contrast to the many wetted parts of CMOS and MEMS flow sensors, Sierra uses its advanced 316L stainless steel platinum-wound capillary sensor technology to deliver the highest reliability, repeatability and stable accuracy.

The Smart-Trak 50 Series offers flexibility and simplicity of operation. Both analog and digital inputs and outputs are available, enabling the 50 Series to work with older analog systems or the newest multi-drop digital tools. Field adjustment of zero and span enable the small adjustments in calibration necessary to align with on-site process conditions.

Learn more about Smart-Trak 50 Series


Sierra Instruments is a global leader in fluid flow measurement and control for nearly 40 years and is known for its high performance flow instrumentation for gas, liquid and steam applications commonly found in the semiconductor, environmental, scientific research, petrochemical, energy, aerospace, and general manufacturing industries. With over 150 locations in over 50 countries, Sierra is positioned to support customers across the globe to solve tough flow problems.

Press Contact:

Maryadine Washington, Marketing Comm. Manager


FAX 831/-373-4402

Technical Contact:

Scott Rouse, Product Line Director


Fax: 831-373-4402

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