Rudolph Technologies Appoints Avishai Kepten as Vice President and General Manager


Flanders, New Jersey (October 21, 2010) - Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, today announced the appointment of Dr. Avishai Kepten as Vice President and General Manager of the Company's Metrology Business Unit.

Dr. Kepten has over 25 years of experience in the semiconductor and solar industries. He comes to Rudolph Technologies from Spire Corporation, where he was Vice President of Solar Cell Lines. Prior to that, he spent six years at Novellus Systems, as Director of Technology and Director of New Product Development of the Electrofill Business Unit. He managed process development, engineering projects and customers' engagements, initiated and developed innovative and disruptive process technologies and was instrumental in positioning Novellus Systems market leadership. Previously he was Vice President of Technology at Steag CVD Systems, later acquired by Matteson Technology. Earlier in his career, Avishai was with Tower Semiconductor, a wafer foundry fab and long-standing customer of Rudolph's Metrology Business, where he was a Process Engineering Section Head and Flash Mixed Signal Programs Manager with particular focus on manufacturing line yield and tool uptime. His strong leadership, experience and global network of relationships within Rudolph's customer base make Dr. Kepten an excellent choice to be part of Rudolph's executive team.

Avishai holds a Ph.D. and Master of Science, Electrical Engineering in the area of Microelectronics and Bachelor of Science Electrical Engineering, all from the Technion, Israel Institute of Technology, and did his Post Doctoral work as a Resident Scientist with the Microelectronics Center of North Carolina (MCNC).

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company's yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Contacts:

Investors:

Steven R. Roth

973.448.4302

steven.roth@rudolphtech.com

Trade Press:

Virginia Becker

952.259.1647

virginia.becker@rudolphtech.com

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