Plasma-Therm Provides Plasma Processing Workshop to Penn State University's Nanofabrication Laboratory
St. Petersburg, Florida – Researchers recently attended Plasma-Therm’s advanced plasma processing workshop, held at The Pennsylvania State University Nanofabrication Laboratory. Workshop attendees from disciplines as diverse as MEMS, solid state lighting, power, photonics, and nanotechnology, participated in the full-day event to learn about fundamental and advanced technologies used in semiconductor device fabrication, materials research and nanotechnology. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has recently conducted more than 15 one- and two-day workshops at preeminent institutions in Singapore, United States, Sweden, China, South Korea, and Israel.
Guy Lavalle, Lead Etch Engineer at the Penn State Nanofab, expressed his appreciation to Plasma- Therm, for its efforts in coordinating and providing a first-class workshop on the Fundamentals of Plasma Processing at Penn State. “We have received numerous comments from the attendees of the work shop on how enlightening the information presented was in regard to their research efforts. I personally found it very helpful and instructive to have an equipment manufacturer take the time to interact with the users of our facility and to provide them an open forum to ask questions and receive positive feedback and guidance on process related issues they were encountering.”
Wei Huang, RD Process Engineer at UTC Aerospace Systems, one of the attendees that travelled several hours to attend commented, “The workshop was very informative and helpful. The topics, from plasma basics to various applications, are very well organized and clearly presented. The knowledge I learned in the workshop will serve as a valuable resource in my work.”
“The high level of interaction at these workshops is particularly rewarding” remarked Dr. David Lishan, workshop organizer and instructor. “The diverse research groups keep the discussion lively both during lectures and networking breaks. It is clear that workshop attendees desire not only content about plasma processing fundamentals but more advanced information applying to their specific fabrication needs. The technical exchange benefits everyone and extends beyond the workshop, which is very pleasing.”
About Pennsylvania State University’s Nanofabrication Laboratory:
The Penn State Nanofabrication Facility (Nanofab) is a fully staffed, user research facility that enables fabrication and characterization of a wide range of devices to support fundamental and applied research in diverse fields spanning electronics to medicine. More than 400 researchers from Penn State, other universities, government labs, and industry take advantage of the expertise and world-class facilities located at the Millennium Science Complex in the heart of Penn State’s University Park campus. The facility has cross-disciplinary expertise in the areas of spectroscopy, biology, chemistry, physics, optics, electrical engineering and engineering science.
The Nanofab provides specialized instruments and technical support in areas that mirror Penn State’s faculty research strengths and educational needs. For users, the Nanofab provides the opportunity to do hands-on research with some of the world’s most sophisticated instruments for the fabrication and characterization of materials at the micro and nanoscale.
The Nanofab is a member of the NSF supported National Nanotechnology Infrastructure Network (NNIN), an integrated partnership of 14 universities’ user facilities. NNIN’s provides users from outside the universities unparalleled opportunities for nanoscience and nanotechnology research and development.
About Plasma-Therm:
Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, wireless communication and advanced photomask etching. Offering leading etching and deposition technologies and solutions for these markets, customers have recognized Plasma-Therm for the last 14 years for their products and service with VLSIresearch awards. Sales and service locations throughout North America, Europe and Asia Pacific, meet the diverse needs of Plasma-Therm’s global base of over 600 customers. For further information please visit www.plasmatherm.com.
