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Original Press Release

Plasma-Therm Holds One-Day Workshop at The University of Texas at Austin

Press release date: Nov 06, 2012

The University of Texas at Austin Microelectronics Research Center and Plasma-Therm host Plasma Processing Technical Workshop

St. Petersburg, Florida - Plasma-Therm has provided an advanced, one- day plasma processing workshop at The University of Texas at Austin Microelectronics Research Center (MRC). Presentations addressed both fundamental and advanced plasma etching as well as deposition technologies used primarily in semiconductor device fabrication and materials science research. The MRC facility, part of NNIN (National Nanofabrication Infrastructure Network), provides resources for both academic and industrial users and attracts researchers from throughout the world. Attendees included graduate students, facility staff, post-doctoral researchers, and engineers from 11 local companies and universities as well as from start-ups to market leaders. This technology community outreach event attracted researchers involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.

Prof. Sanjay Banerjee, Director at UT Austin's MRC, reported that, "The recent workshop on plasma etching and deposition provided by Dr. David Lishan of Plasma-Therm was attended by over 70 people from the University of Texas and other schools and industrial labs. Extremely valuable training was provided about the fundamental physics of plasma processing, as well as practical insights about plasma etching and deposition."

"The high attendance at these workshops is evidence of significant enthusiasm for information relating to semiconductor and materials processing." Dr. David Lishan, Plasma-Therm Principal Scientist and workshop organizer continued, "Providing technical communities such as the one in Austin, with these plasma processing workshops is personally very satisfying and exposes Plasma-Therm to leaders in R&D in many different disciplines. We are especially honored that attendees have traveled as long as nearly 4 hours to participate."

About The University of Texas at Austin, Microelectronics Research Center (MRC)

The mission of the MRC at UT-Austin is to perform education and research in electronic materials, devices and processes of interest to the semiconductor integrated circuit and optoelectronics industries. In the silicon area, MRC has developed new approaches to scaling classical transistors to deep submicron geometries, resulting in high levels of integration, reliability, and performance in integrated circuits. These include silicon heterostructure, high mobility and nanowire transistors, and carbon electronics. Breakthroughs in silicon-based MEMS systems for chemical detection and organic electronics have led to technology spin-offs. MRC's optoelectronics group has developed novel vertical-cavity and quantum cascade lasers, solar cells and radically new photodetectors based on GaN and related materials. MRC facilities include 12,000 sq. ft. of cleanroom space for crystal-growth and device processing and 15,000 square feet of characterization laboratories The cleanroom contains complete silicon device processing capability, including optical, electron beam and nanoimprint lithography, physical and chemical vapor deposition (CVD), furnace and rapid thermal processing systems, wet chemistry stations and dry etching tools from Plasma-Therm and others (

About Plasma-Therm

Established in 1974, Plasma-Therm is a U.S. manufacturer of advanced plasma processing equipment focusing on research and development systems to high volume production in specialty semiconductor markets including solid state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication. They offer leading etching and deposition technologies and solutions for these markets. Sales and service locations throughout North America, Europe and Asia- Pacific, meet the diverse needs of Plasma-Therm's global customer base. For further information please visit