Advanced Energy® Awarded Design Win by Leading Provider of Semiconductor CVD Equipment
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AE®'s Sekidenko temperature and emissivity instrumentation enables precise, repeatable volume production for sub-90-nm devices
FORT COLLINS, Colo., May 16, 2006-Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced it has secured a design win for its Sekidenko temperature and emissivity instrumentation from a leading provider of chemical vapor deposition (CVD) equipment for semiconductor manufacturing. The Sekidenko instruments provide advanced, multi-channel temperature measurement for use in sub-90-nm low-k dielectric film and high-stress silicon nitride cures. The innovative, integrated solution benefits the customer by providing enhanced wafer-to-wafer uniformity and improved overall process yield. This design win highlights AE's strong ability to develop application-specific solutions that address important technology issues affecting the success of its customers.
AE's thermal instrumentation technology offers in-situ, non-contact optical fiber thermometer (OFT) capability with real-time emissivity compensation. For sub-90-nm applications, AE's Sekidenko instrumentation delivers the high stability, exceptional repeatability and precision required for advanced, volume-production environments.
"This design win demonstrates AE's talent for addressing our customers' process concerns with innovative technology," noted Dr. Hans Betz, AE president and CEO. "Applying our broad application expertise in thermal instrumentation, we worked in partnership with this customer to build an application-specific temperature and emissivity solution that optimizes their process. As we grow our position in this core semiconductor market, we continue to proactively listen to our customers to help them gain competitive advantages with our solutions."
Sekidenko Optical Fiber Thermometers (OFTs) AE's Sekidenko optical fiber thermometers (OFT) with real-time emissivity compensation are in-situ, non-contact instruments that enable customers to improve within-wafer and wafer-to-wafer temperature uniformity. Further, AE's custom, thermal-instrumentation application consulting includes heat-transfer design analysis, extensive material evaluation and custom interface solutions.
About Advanced Energy
Advanced Energy develops innovative power and control technologies that drive high-growth, plasma thin-film and nanotech manufacturing processes worldwide, including semiconductors, flat panel displays, data storage products, solar cells, architectural glass and other advanced product applications.
AE's product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia, and Europe and offers global sales and support through direct offices, representatives, and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, go to advanced-energy.com
Advanced Energy® and AE® are trademarks of Advanced Energy Industries, Inc.
CONTACTS:
Marna Shillman
Corporate Communication Manager
Advanced Energy Industries, Inc.
970.407.6280
marna.shillman@aei.com/
