Ulvac Technologies, Inc.

Leak Detectors come with color touchscreen display.

Leak Detectors come with color touchscreen display.

Series Heliot 700 helium leak detectors have multiple valve design that provides sensitivity of 10-12 Torr. Features include start-up auto-calibration, optional external leak calibration, and CE mark/IP30. Four models are available: small and large rotary vane, dry diaphragm, and dry scroll pump. Troubleshooting is accomplished with integrated maintenance software.

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Vacuum Pump works at variable pumping speeds.
Fluid & Gas Flow Equipment

Vacuum Pump works at variable pumping speeds.

Inverter equipped DYM series high speed dry vacuum pump provides pumping speeds from 330 to 1,200 m3/hr. It combines company's DR-C series dry pump and PRC-A series mechanical booster pump. Pumps are close coupled inside enclosed frame for CVD and etch applications, and unit is coated with TUFRAM(TM) for resistance to corrosive chemicals and wear. It has control system, RS232C interface, and...

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Vacuum Gauge can be baked to 300 deg C.
Test & Measurement

Vacuum Gauge can be baked to 300 deg C.

Vacuum gauge offers Bessel-Box type energy filter and axially symmetric transmission (AxTRAN) gauge head. Its measurable pressure range is 7.5 x 10E-4 torr to 3.5 x 10E-13 torr. AxTRAN is resistant to interfering noise effects caused by light, radiation, and electrostatic discharge ions. Control unit is world-voltage compatible (85V - 240VAC 50/60Hz), and offers bright LED display and 0-10V...

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Sputter Ion Pumps have no moving parts.
Fluid & Gas Flow Equipment

Sputter Ion Pumps have no moving parts.

Vibration-free ACTER series sputter ion pumps for ultra high and extremely high vacuum (UHV and XHV) applications consist of optimized magnetic field and internal pumping arrays (ACTER cells). Pumps offer minimal magnetic flux density leakage and rapid recovery from brief power interruptions. They have no moving parts, and can attain ultimate pressure of 10E-10 Pa. Suitable applications include...

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Gas Analyzer checks residual gas in vacuum systems.

Gas Analyzer checks residual gas in vacuum systems.

PC-controlled REGA quadrupole mass spectrometer measures residual gas in PVD systems and high vacuum pumping equipment, performs gas analysis for PVC processes and thermal desorption spectroscope studies, and functions as in-situ system helium leak detector. Its analyzer head reads total pressure, eliminating need for separate hot cathode ionization vacuum gauge. Control unit operates on 24VDC,...

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Gas Process Monitor is suitable for CVD applications.
Communication Systems & Equipment

Gas Process Monitor is suitable for CVD applications.

Compact, corrosion-resistant REPROS monitors and controls etch or deposition processes, measures residual gases, and can be used for leak detection. It monitors reactive gases at pressures up to 9.75 torr. Unit has conductance valve with 3 gas inlet modes, differentially pumped mass filter system, and closed ion source with magnetic field enhancement of ionization chamber. Monitor operates on 24...

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Vacuum Pump suits semiconductor CVD and etch applications.

DRYMAC PDR-C series with multi-stage Roots pump design is available in 47, 74, and 139 cfm ratings, with integrated booster pumps for 200, 400 or 600 cfm. Lightweight aluminum casing and rotor create uniform operating temperatures throughout six Roots stages. Uniform temperatures help prevent condensable process gas byproducts from adhering to internal pump surfaces. Unit is coated in Tufram for...

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