KLA-Tencor Corp.

KLA-Tencor Introduces Key Systems for 5D(TM) Patterning Control Solution
Machinery & Machining Tools

KLA-Tencor Introduces Key Systems for 5D(TM) Patterning Control Solution

Accelerating The Ramp Of Advanced Patterning Techniques For Sub-20nm Design Nodes MILPITAS, Calif., -- Today, KLA-Tencor Corporation (NASDAQ: KLAC) introduced the WaferSight(TM) PWG patterned wafer geometry measurement system, the LMS IPRO6 reticle pattern placement metrology system and the K-T Analyzer(®) 9.0 advanced data analysis system. These three new products support KLA-Tencor's unique...

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Machinery & Machining Tools

KLA-Tencor Introduces Inspection and Review Portfolio for Leading IC Technologies

Systems Offer Comprehensive Defect Information for Solving Yield Challenges SAN FRANCISCO -- Today at SEMICON West, KLA-Tencor Corporation (NASDAQ: KLAC) announced four new systems--the 2920 Series, Puma(TM) 9850, Surfscan® SP5 and eDR(TM)-7110--that provide advanced defect inspection and review capability for the development and production of 16nm and below IC devices. The 2920 Series broadband...

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Reticle Inspection System monitors sub-20 nm design nodes.
Agricultural & Farming Products

Reticle Inspection System monitors sub-20 nm design nodes.

With 193 nm illumination, Teron™ SL650 assesses incoming reticle quality, monitors degradation, and detects yield-critical reticle defects,- such as haze growth or contamination. System supports mix of reticle types by using STARlightSD™ and STARlightMD™ to produce defect capture and comprehensive inspection coverage on single- and multi-die reticles, respectively. Chipmakers can also use...

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Sensors, Monitors & Transducers

KLA-Tencor Announces New Additions to Its Defect Inspection and Review Portfolio

Coupling electron-beam review with optical inspection facilitates rapid defect discovery, identification and sourcing MILPITAS, Calif. -- Today KLA-Tencor Corporation (NASDAQ: KLAC) announced the new 2910 Series optical wafer defect inspection platform with NanoPoint™ technology and the new eDR™-7100 electron-beam wafer defect review system. Meeting IC manufacturers' need for accelerated...

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Machinery & Machining Tools

KLA-Tencor Announces Two Additions to Litho/Etch Process Control Portfolio

New metrology and inspection tools facilitate advanced patterning techniques for manufacturing sub-20nm memory and microprocessor chips MILPITAS, Calif.- At the SPIE Advanced Lithography conference, KLA-Tencor Corporation (NASDAQ: KLAC) announced its SpectraShape™ 9000 optical critical dimension (CD) metrology system and BDR300™ backside defect inspection and review module. The SpectraShape...

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Test & Measurement

Wafer Inspection Tool targets LED and adjacent markets.

Designed for defect inspection and 2D metrology for LED applications, ICOS WI-2280 supports MEMS and semiconductor wafers spanning 2–8 in. in size. System features rule-based binning defect classification and recipe qualification engine, enabling manufacturers to optimize process control and process tool monitoring strategies. To accommodate multiple media with minimal changeover time, ICOS...

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Reticle Inspection Systems cover nodes to 20 nm and beyond.
Sensors, Monitors & Transducers

Reticle Inspection Systems cover nodes to 20 nm and beyond.

IC fab-based inspection systems X5.2(TM) and Teron(TM) 611 comprise Total ReQual(TM) solution for monitoring defectivity and pattern degradation resulting from cleaning or exposure. While sensitivity of Teron 611 is optimized for 20 nm node and beyond, X5.2 works on full mask sets at 28 nm and larger design nodes as well as 20 nm node. Both systems offer fifth-generation STARlight® inspection...

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Agricultural & Farming Products

KLA-Tencor Announces Installation of First 450mm-Capable Surfscan® SP3 Systems

Unpatterned wafer defect inspection tools provide broad capability to enable critical infrastructure development MILPITAS, Calif. - Today KLA-Tencor Corporation (NASDAQ: KLAC) announced the installation of its first process control systems capable of handling and inspecting 450mm wafers: a new configuration of the market-leading Surfscan® SP3 platform called the Surfscan SP3 450. Fully...

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