TecHarmonic, Inc.

Wet Scrubber combines compact size, efficient design.
Cleaning Products & Equipment

Wet Scrubber combines compact size, efficient design.

Measuring 1.7 x 2 x 3 ft, Monsoon provides exhaust scrubbing capacity of 400 Lpm for etchers or 12,000 Lpm for fume hoods and consumes 2 gph to conserve water usage. Design solves challenge of exhaust clogging via integration of 4 in. inlet, optionally heated up to 300°C. By removing HCl, unit minimizes maintenance and loss of production due to ammonium hydroxide and HCl forming aluminum...

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Material Processing

Gas Abatement System achieves DREs above 95%.

Powered by electric heaters that completely eliminate use of methane, Alpine-S is capable of abating all process and PFC gas emissions with destruction and removal efficiencies (DREs) of over 95% for both chemical vapor deposition and etch applications. Flameless, catalytic decomposition reactor operates in range of 850-950°C, while vortex device removes heat, particles and water-soluble...

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Wet Scrubber combines compact size, efficient design.
Cleaning Products & Equipment

Wet Scrubber combines compact size, efficient design.

Measuring 1.7 x 2 x 3 ft, Monsoon provides exhaust scrubbing capacity of 400 Lpm for etchers or 12,000 Lpm for fume hoods and consumes 2 gph to conserve water usage. Design solves challenge of exhaust clogging via integration of 4 in. inlet, optionally heated up to 300°C. By removing HCl, unit minimizes maintenance and loss of production due to ammonium hydroxide and HCl forming aluminum...

Read More »
Material Processing

Gas Abatement System achieves DREs above 95%.

Powered by electric heaters that completely eliminate use of methane, Alpine-S is capable of abating all process and PFC gas emissions with destruction and removal efficiencies (DREs) of over 95% for both chemical vapor deposition and etch applications. Flameless, catalytic decomposition reactor operates in range of 850-950°C, while vortex device removes heat, particles and water-soluble...

Read More »

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