Energetiq Technology Inc.
Woburn, MA 01801
EUV Light Source targets HVM testing applications.
Operating at pulse rate of 10 kHz, EQ-10HR produces EUV light suited for infrastructure development for EUV lithography. It incorporates electrodeless Z-Pinch technology, which inductively couples current into discharge plasma, optimizing plasma control and stability and confining plasma away from source components. Product offers simplified integration into process tools and maintains repetition...
Read More »DUV Lamp Subsystem features short wavelength operation.
Saturn(TM) DUV (Deep Ultra Violet) Lamp Subsystem offers an operating wavelength range of 170-400 nm to eliminate electrical/heat damage in thin-film and surface processes. System features include compact housing, debris-free electrodeless toroidal bulb design, integrated power supply, internal water cooling, and re-circulating nitrogen cooling to avoid toxic ozone production. Light source is...
Read More »Debbie Gustafson, CEO of Energetiq Technology, recognized in 2021 SPIE Women in Optics Planner
WILMINGTON, Mass., Jan. 13, 2021 /PRNewswire/ -- Energetiq Technology, a world leader in high brightness broadband light sources, is celebrating the recognition of its CEO Debbie Gustafson in the 2021 SPIE Women in Optics Planner. Each year since 2005 SPIE, the international society for optics and photonics, has produced the Women in Optics Planner, highlighting women making a difference...
Read More »Energetiq Technology to Celebrate Grand Opening of New Facility to Accommodate Growth
Ribbon cutting and dedication ceremony at new clean manufacturing facility for high brightness light sources. Wilmington, Mass., Sept. 5, 2019 /PRNewswire/ -- Energetiq Technology, a world leader in high brightness broadband light sources is hosting a Grand Opening at its facility north of Boston, MA. A ribbon cutting ceremony will take place on September 10, 2019 followed by a dedication...
Read More »Energetiq Appoints Elliot Scientific as Distributor for Laser-Driven Light Source Products in UK and Ireland
Partnership brings about enhanced instrumentation choices for the region's scientific and industrial communities Woburn, MA - January 19, 2011 - Energetiq Technology, Inc., a developer and manufacturer of ultrahigh-brightness light sources for advanced technology applications, has appointed Elliot Scientific Ltd. as its distributor in the United Kingdom and Ireland for Energetiq's range of...
Read More »EUV Light Source targets HVM testing applications.
Operating at pulse rate of 10 kHz, EQ-10HR produces EUV light suited for infrastructure development for EUV lithography. It incorporates electrodeless Z-Pinch technology, which inductively couples current into discharge plasma, optimizing plasma control and stability and confining plasma away from source components. Product offers simplified integration into process tools and maintains repetition...
Read More »DUV Lamp Subsystem features short wavelength operation.
Saturn(TM) DUV (Deep Ultra Violet) Lamp Subsystem offers an operating wavelength range of 170-400 nm to eliminate electrical/heat damage in thin-film and surface processes. System features include compact housing, debris-free electrodeless toroidal bulb design, integrated power supply, internal water cooling, and re-circulating nitrogen cooling to avoid toxic ozone production. Light source is...
Read More »