Kebaili Corp.

MEMS Micro Hot Plates suit chemical sensor applications.
HVAC

MEMS Micro Hot Plates suit chemical sensor applications.

Featuring platinum resistive thin-film microheater attached between freestanding thin-film silicon nitride and silicon dioxide membranes, KMHP-100 MEMS microhotplate can operate continuously at up to 650°C. It consists of micromachined silicon die attached to gold-plated TO-18 package, which insures stable operation in harsh/hostile environment. Freestanding thin-film silicon nitride...

Read More »
MEMS Micro Hot Plates suit chemical sensor applications.
HVAC

MEMS Micro Hot Plates suit chemical sensor applications.

Featuring platinum resistive thin-film microheater attached between freestanding thin-film silicon nitride and silicon dioxide membranes, KMHP-100 MEMS microhotplate can operate continuously at up to 650°C. It consists of micromachined silicon die attached to gold-plated TO-18 package, which insures stable operation in harsh/hostile environment. Freestanding thin-film silicon nitride...

Read More »

All Topics