Aerotech, Inc.
Pittsburgh, PA 15238-2811
Silicon Carbide XY Air-Bearing Stage is built for precision.
Used for semiconductor manufacturing and advanced test/inspection, PlanarHDX is available with passive or active isolation systems. FEA-optimized silicon carbide structure and optimized air-bearing compensation maximize dynamic performance while maintaining geometric characteristics and positioning accuracy. This planar air-bearing platform is capable of 1.5 m/sec scan speeds and 5 g peak...
Read More »Silicon Carbide XY Air-Bearing Stage is built for precision.
Used for semiconductor manufacturing and advanced test/inspection, PlanarHDX is available with passive or active isolation systems. FEA-optimized silicon carbide structure and optimized air-bearing compensation maximize dynamic performance while maintaining geometric characteristics and positioning accuracy. This planar air-bearing platform is capable of 1.5 m/sec scan speeds and 5 g peak...
Read More »Compact, Precision Ball-Screw Stage with Linear Encoder
• Compact stage with travels to 100 mm • Precision-ground ball-screw drive • DC servo or stepper motor • High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm) A compact, high-performance linear positioning stage, Aerotech's MPS75SLE features exceptionally smooth travel combined with outstanding accuracy, repeatability and positioning resolution capability to 25...
Read More »Compact, Precision Ball-Screw Stage with Linear Encoder
• Compact stage with travels to 100 mm • Precision-ground ball-screw drive • DC servo or stepper motor • High resolution (0.025 -µm), repeatability (±0.1 µm) and accuracy (±0.75 µm) A compact, high-performance linear positioning stage, Aerotech's MPS75SLE features exceptionally smooth travel combined with outstanding accuracy, repeatability and positioning resolution...
Read More »Integrated XY Ball-Screw Stage for Cost-Sensitive Planar Performance
• Integrated, low-profile, XY, ball-screw stage • Long-life linear motion guide bearing system • Optional low thermal expansion glass linear encoder • Cost-effective, high-precision planar performance Aerotech's PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-sensitive, low-profile package. Combining two axes of motion in a compact package,...
Read More »Integrated XY Ball-Screw Stage for Cost-Sensitive Planar Performance
• Integrated, low-profile, XY, ball-screw stage • Long-life linear motion guide bearing system • Optional low thermal expansion glass linear encoder • Cost-effective, high-precision planar performance Aerotech's PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-sensitive, low-profile package. Combining two axes of motion in a compact package,...
Read More »Npaq 6U High-Power Drive Rack Provides up to 30 A for Brush, Brushless or Stepper Motors
High-power 6U modular drive chassis in 19-inch rack-mount design Drive brush, brushless or stepper motors with the same amplifier 5 A to 30 A peak output current; supports PWM or linear amplifiers Digital current, velocity and position loops for improved motion stability Integrated encoder multiplier for higher throughput and reduced wiring Encoder and resolver feedback CE approval Aerotech's...
Read More »Npaq 6U High-Power Drive Rack Provides up to 30 A for Brush, Brushless or Stepper Motors
High-power 6U modular drive chassis in 19-inch rack-mount design Drive brush, brushless or stepper motors with the same amplifier 5 A to 30 A peak output current; supports PWM or linear amplifiers Digital current, velocity and position loops for improved motion stability Integrated encoder multiplier for higher throughput and reduced wiring Encoder and resolver feedback CE approval Aerotech's...
Read More »Compact Vertical Translation Stage Offers 0.05 µm Minimum Incremental Motion
• Compact, high-performance elevation stage • Precision-ground ball screw or lead screw • DC or stepper motor • High-vacuum capable • Precision crossed-roller bearings • Multi-axis configurations available with MPS linear and rotary stages Aerotech's MPS-SV series lift stages provide high-performance elevation motion in a compact, cost-effective design. These lift stages are...
Read More »Compact Vertical Translation Stage Offers 0.05 -µm Minimum Incremental Motion
• Compact, high-performance elevation stage • Precision-ground ball screw or lead screw • DC or stepper motor • High-vacuum capable • Precision crossed-roller bearings • Multi-axis configurations available with MPS linear and rotary stages Aerotech's MPS-SV series lift stages provide high-performance elevation motion in a compact, cost-effective design. These lift stages are...
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