Aerotech, Inc.
Pittsburgh, PA 15238-2811
XYZ Piezo Stages for Exceptional 3D Positioning Accuracy
Travels to 120 μm x 120 μm x 12 μm 40 x 40 mm square clear aperture Patent-pending parallel-kinematic design provides unmatched geometric performance Superior positioning resolution and linearity with direct-metrology capacitive sensor Aerotech’s QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact...
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High-Speed, Direct-Drive Rotary Stage with Collet Chuck
Optimized system design for maximum acceleration High-speed operation (up to 3000 rpm) Integral captive pneumatic collet-chuck for minimal part motion during clamping Type-D collet accepts 0.1 mm to 2 mm O.D. tubing Clear aperture and guide system for product feed-through Direct-drive brushless motor with optional water cooling for performance stability Maintenance-free, frictionless rotary union...
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QNP2 Series XY Piezo Nanopositioning Stages with 50 mm x 50 mm Aperture
Patent-pending design provides unmatched geometric performance Superior multi-axis accuracy via parallel-kinematic design Custom materials and vacuum versions Travels to 120 -µm x 120 -µm 50 x 50 mm clear square aperture Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact,...
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Industrial Linear Stages increase performance via feature set.
Available in cleanroom prepared and vacuum versions, PRO-LM linear motor stages and PRO-SL/SLE ball-screw linear stages employ recirculating linear guide bearing system and- low-friction sealing solution for extended life in industrial applications. Design provides protection from debris, while ThermoComp™ embedded temperature compensation unit ensures accurate positioning in variable...
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Hexapod Positioner delivers sub-micrometer precision.
Offering linear travels to 110 mm and angular travels to 40-
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Silicon Carbide XY Air-Bearing Stage is built for precision.
Used for semiconductor manufacturing and advanced test/inspection, PlanarHDX is available with passive or active isolation systems. FEA-optimized silicon carbide structure and optimized air-bearing compensation maximize dynamic performance while maintaining geometric characteristics and positioning accuracy. This planar air-bearing platform is capable of 1.5 m/sec scan speeds and 5 g peak...
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Compact, Precision Ball-Screw Stage with Linear Encoder
• Compact stage with travels to 100 mm • Precision-ground ball-screw drive • DC servo or stepper motor • High resolution (0.025 -µm), repeatability (-
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Integrated XY Ball-Screw Stage for Cost-Sensitive Planar Performance
• Integrated, low-profile, XY, ball-screw stage • Long-life linear motion guide bearing system • Optional low thermal expansion glass linear encoder • Cost-effective, high-precision planar performance Aerotech's PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-sensitive, low-profile package. Combining two axes of motion in a compact package,...
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Npaq 6U High-Power Drive Rack Provides up to 30 A for Brush, Brushless or Stepper Motors
High-power 6U modular drive chassis in 19-inch rack-mount design Drive brush, brushless or stepper motors with the same amplifier 5 A to 30 A peak output current; supports PWM or linear amplifiers Digital current, velocity and position loops for improved motion stability Integrated encoder multiplier for higher throughput and reduced wiring Encoder and resolver feedback CE approval Aerotech's...
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Compact Vertical Translation Stage Offers 0.05 µm Minimum Incremental Motion
• Compact, high-performance elevation stage • Precision-ground ball screw or lead screw • DC or stepper motor • High-vacuum capable • Precision crossed-roller bearings • Multi-axis configurations available with MPS linear and rotary stages Aerotech's MPS-SV series lift stages provide high-performance elevation motion in a compact, cost-effective design. These lift stages are...
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