Brooks Instrument, an ITW Company

New SLA5800 Series Mass Flow Controllers Enhance Diagnostic and Alarm Capabilities
Controls & Controllers

New SLA5800 Series Mass Flow Controllers Enhance Diagnostic and Alarm Capabilities

The SLA5800 Series Mass Flow Controllers are now offered with EtherNet/IP™ digital communications interface. The units are suitable for applications such as life science, chemical/petrochemical research, laboratory, analytical, fuel cell, thin film and other segments. The web-based interface allows network settings for configuring controllers. The units offer improved zero-drift specification...

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Brooks Instrument Licenses DLI Vaporizer Technology to Ceres Technologies
Thermal & Heating Equipment

Brooks Instrument Licenses DLI Vaporizer Technology to Ceres Technologies

Hatfield, Pa. (January 14, 2019) – Brooks Instrument, a world leader in advanced flow, pressure, vacuum and vapor delivery solutions, has licensed its direct liquid injection (DLI) vaporizer technology to Ceres Technologies, Inc., headquartered in Saugerties, NY. The Brooks Instrument DLI vaporizer incorporates unique atomization and heat exchanger technologies to deliver pure vapor for a wide...

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Mass Flow Controllers serve semiconductor, LED applications.
Controls & Controllers

Mass Flow Controllers serve semiconductor, LED applications.

High-purity GF101 as well as ultra high-purity GF121 and GF126 deliver accuracy and response time suited for gas flow control in semiconductor and LED manufacturing processes. Designed for process applications that include high-flow purge, epitaxial, and blanket gas control, these controllers provide flow rates up to 300 slpm N2 equivalent. Multiple digital and analog I/O interface options...

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Thermal Mass Flow Controller features 5.28 in. length.
Controls & Controllers

Thermal Mass Flow Controller features 5.28 in. length.

Used for gas flow rates up to 300 slpm, GF81 has all-metal seal flow path that allows handling of almost any gas –Â- including corrosive and hazardous gases. Minimized footprint and power draw enables design of smaller, more efficient systems; sensor fosters stable, accurate, and repeatable mass flow measurement; and digital and analog I/O options offer range of communication protocols....

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Test & Measurement

MT3809 XP Flameproof Flow Meters

HATFIELD, Pa. – We've upgraded our MT3809 variable area (VA) armored flow meters. Now you can get everything you need for demanding liquid, gas and steam applications – everywhere you need it. The all-new MT3809 gives you: • Accuracy across an ultra-wide range of flow rates and temperatures • Explosion-proof housing for the world's most stringent hazardous-area classifications • Rugged...

Read More »
Controls & Controllers

Brooks Instrument Launches Upgrades to GF 40/80 Series Thermal Mass Flow Controllers

HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a normally open" valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan, Mykrolis,...

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Variable Area Flowmeter performs under extreme conditions.
Test & Measurement

Variable Area Flowmeter performs under extreme conditions.

Able to be usedÂ- regardless of application, process configuration, or flow rate, armored MT3809 is constructed of stainless steel and performs in conditions common to chemical, petrochemical, oil and gas, and LP gas applications. Unit works across -320 to +780°F range and at pressures to 20K psi, delivering 2% FS/1.6 VDI accuracy in applications measuring gases,...

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Mass Flow Controller aids semiconductor manufacturers.
Computer Hardware & Peripherals

Mass Flow Controller aids semiconductor manufacturers.

Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities thatÂ- verify accuracy, check valve leak-by, and monitor sensor drift,...

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SolidSense II Pressure Transducers Receive International Explosion-Proof Rating
Sensors, Monitors & Transducers

SolidSense II Pressure Transducers Receive International Explosion-Proof Rating

HATFIELD, Pa. - Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has received International Electrotechnical Commission (IECEx) certification for its SolidSense II pressure transducers. The accreditation confirms that these products are suitable for use in hazardous environments regulated for explosions caused by flammable liquids, vapor, gases...

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Controls & Controllers

Brooks Instrument Launches New Mass Flow and Capacitance Manometer Technology at Intersolar North America 2012

HATFIELD, Pa. - Brooks Instrument will unveil its new XacTorr CMX0 capacitance manometer, as well as the new EtherCAT capabilities of its GF40/80 mass flow controller at Intersolar North America, July 10-12 in San Francisco. Brooks will showcase these and other mass flow, pressure and vacuum products for the solar and semiconductor industries at Booth 5648. The Brooks XacTorr CMX family of...

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People in the News

Brooks Instrument Names Eric Pipal as New Vice President and General Manager

Hatfield, Pa. (March 15, 2019) – Eric Pipal has been promoted to Vice President and General Manager at Brooks Instrument, a world leader in advanced flow, pressure, vacuum and vapor delivery solutions. Pipal originally joined Brooks Instrument as an Operations Director in 2007. Since then, he’s held positions of increasing responsibility within the operations department prior to taking a...

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New SLA5800 Series Mass Flow Controllers Enhance Diagnostic and Alarm Capabilities
Controls & Controllers

New SLA5800 Series Mass Flow Controllers Enhance Diagnostic and Alarm Capabilities

The SLA5800 Series Mass Flow Controllers are now offered with EtherNet/IP™ digital communications interface. The units are suitable for applications such as life science, chemical/petrochemical research, laboratory, analytical, fuel cell, thin film and other segments. The web-based interface allows network settings for configuring controllers. The units offer improved zero-drift specification...

Read More »
Brooks Instrument Licenses DLI Vaporizer Technology to Ceres Technologies
Thermal & Heating Equipment

Brooks Instrument Licenses DLI Vaporizer Technology to Ceres Technologies

Hatfield, Pa. (January 14, 2019) – Brooks Instrument, a world leader in advanced flow, pressure, vacuum and vapor delivery solutions, has licensed its direct liquid injection (DLI) vaporizer technology to Ceres Technologies, Inc., headquartered in Saugerties, NY. The Brooks Instrument DLI vaporizer incorporates unique atomization and heat exchanger technologies to deliver pure vapor for a wide...

Read More »
Mass Flow Controllers serve semiconductor, LED applications.
Controls & Controllers

Mass Flow Controllers serve semiconductor, LED applications.

High-purity GF101 as well as ultra high-purity GF121 and GF126 deliver accuracy and response time suited for gas flow control in semiconductor and LED manufacturing processes. Designed for process applications that include high-flow purge, epitaxial, and blanket gas control, these controllers provide flow rates up to 300 slpm N2 equivalent. Multiple digital and analog I/O interface options...

Read More »
Company News

Brooks Instrument Invests in California Technology Development Center

HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has made a new investment in its technology center in Irvine, California. The facility has been fully equipped with gas lines and test equipment at every workstation and in labs for characterizing gas and liquid flow instrumentation to facilitate research. The goal of Brooks’...

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Thermal Mass Flow Controller features 5.28 in. length.
Controls & Controllers

Thermal Mass Flow Controller features 5.28 in. length.

Used for gas flow rates up to 300 slpm, GF81 has all-metal seal flow path that allows handling of almost any gas –Â- including corrosive and hazardous gases. Minimized footprint and power draw enables design of smaller, more efficient systems; sensor fosters stable, accurate, and repeatable mass flow measurement; and digital and analog I/O options offer range of communication protocols....

Read More »
Test & Measurement

MT3809 XP Flameproof Flow Meters

HATFIELD, Pa. – We've upgraded our MT3809 variable area (VA) armored flow meters. Now you can get everything you need for demanding liquid, gas and steam applications – everywhere you need it. The all-new MT3809 gives you: • Accuracy across an ultra-wide range of flow rates and temperatures • Explosion-proof housing for the world's most stringent hazardous-area classifications • Rugged...

Read More »
Controls & Controllers

Brooks Instrument Launches Upgrades to GF 40/80 Series Thermal Mass Flow Controllers

HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a normally open" valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan, Mykrolis,...

Read More »
Company News

Control Magazine's 2013 Readers' Choice Awards Honor Brooks Instrument for Excellence in Flow Meters

HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, received multiple honors from Control Magazine's 2013 Readers' Choice Awards. Brooks earned high marks in the variable area flow meter, positive displacement flow meter and thermal mass flow meter categories. Brooks placed No. 1 in the variable area flow meter and positive...

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Variable Area Flowmeter performs under extreme conditions.
Test & Measurement

Variable Area Flowmeter performs under extreme conditions.

Able to be usedÂ- regardless of application, process configuration, or flow rate, armored MT3809 is constructed of stainless steel and performs in conditions common to chemical, petrochemical, oil and gas, and LP gas applications. Unit works across -320 to +780°F range and at pressures to 20K psi, delivering 2% FS/1.6 VDI accuracy in applications measuring gases,...

Read More »

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