PI (Physik Instrumente) L.P.
Auburn, MA 01501
Piezo Stage suits nanometrology and nanofabrication.
Offering travel ranges to 800 Â-µm/10,000 µrad, 6-axis Model P-587.6CD provides 6° of freedom, digital dynamic linearization, active trajectory error compensation, and nanometer resolution. Parallel-metrology design, where multiple sensors monitor moving platform against stationary reference, means that all motion is inside servo-loop, no matter which actuator may have caused...
Read More »Nanopositioning Controllers offer 1-12 channels.
Intended for piezo-driven nanopositioning systems, modular Model E-621.CR features analog and networkable digital interfaces. It integrates low-noise piezo power amplifier, high-speed servo controller, and sensor electronics for absolute-measuring capacitive nanopositioning sensors. For position stability, 20-bit A/D and D/A converters are incorporated. Model E-621 can be operated stand-alone or...
Read More »XY Nanopositioning Stage suits nano/biotechnology research.
Featuring 80 x 80 mm aperture, P-542 utilizes frictionless flexure guided design that provides travel range of 200 x 200 Â-µm. Piezo-drives allow multi-axis motion with millisecond response times, and capacitive feedback is integrated for closed-loop operation with subnanometer precision and motion linearity with less than 0.03% error. Design promotes integration and is offered in aluminum-,...
Read More »Nanopositioning Stages suit space-restricted applications.
Featuring direct metrology capacitive sensors, monolithic Nanopositioning Stages deliver resolutions of less than 0.1 nanometer and up to 3 kHz resonant frequency in package smaller than matchbox. Zero-friction flexure guiding system provides nanometer level straightness. For interchangeability of nanomechanisms and controller, stages are equipped with ID chips, which hold all calibration data...
Read More »Nanopositioning Actuators suit limited-space applications.
Featuring non-rotating tip, M-2x series motorized linear actuators are self-contained packages consisting of dc or stepping motor connected to ball screw or lead screw. They integrate non-contacting limit switches, homing sensors, and piezo-tip with 1 nm min incremental motion is optional. Suited for OEM and research applications, products provide design resolutions to 4 nm, pushing forces to 26...
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