PI (Physik Instrumente) L.P.

Communication Systems & Equipment

Piezo Stage suits nanometrology and nanofabrication.

Offering travel ranges to 800 Â-µm/10,000 µrad, 6-axis Model P-587.6CD provides 6° of freedom, digital dynamic linearization, active trajectory error compensation, and nanometer resolution. Parallel-metrology design, where multiple sensors monitor moving platform against stationary reference, means that all motion is inside servo-loop, no matter which actuator may have caused...

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Controls & Controllers

Nanopositioning Controllers offer 1-12 channels.

Intended for piezo-driven nanopositioning systems, modular Model E-621.CR features analog and networkable digital interfaces. It integrates low-noise piezo power amplifier, high-speed servo controller, and sensor electronics for absolute-measuring capacitive nanopositioning sensors. For position stability, 20-bit A/D and D/A converters are incorporated. Model E-621 can be operated stand-alone or...

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Communication Systems & Equipment

XY Nanopositioning Stage suits nano/biotechnology research.

Featuring 80 x 80 mm aperture, P-542 utilizes frictionless flexure guided design that provides travel range of 200 x 200 Â-µm. Piezo-drives allow multi-axis motion with millisecond response times, and capacitive feedback is integrated for closed-loop operation with subnanometer precision and motion linearity with less than 0.03% error. Design promotes integration and is offered in aluminum-,...

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Communication Systems & Equipment

Nanopositioning Stages suit space-restricted applications.

Featuring direct metrology capacitive sensors, monolithic Nanopositioning Stages deliver resolutions of less than 0.1 nanometer and up to 3 kHz resonant frequency in package smaller than matchbox. Zero-friction flexure guiding system provides nanometer level straightness. For interchangeability of nanomechanisms and controller, stages are equipped with ID chips, which hold all calibration data...

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Mechanical Power Transmission

Nanopositioning Actuators suit limited-space applications.

Featuring non-rotating tip, M-2x series motorized linear actuators are self-contained packages consisting of dc or stepping motor connected to ball screw or lead screw. They integrate non-contacting limit switches, homing sensors, and piezo-tip with 1 nm min incremental motion is optional. Suited for OEM and research applications, products provide design resolutions to 4 nm, pushing forces to 26...

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