Test & Measuring Instruments, Sensors, Monitors & Transducers

Automatic Spectroscopic Ellipsometer operates at high speeds.

September 12, 2011

Equipped with automatic R-Theta stage, UNECS-3000A measures thickness and refractive index of transparent or semi-transparent thin film. Automatic mapping function can handle 300 mm dia wafer substrates, and non-contact instrument can measure 106 points on 300 mm dia wafer within 120 sec. Max measurement speed is 20 ms/point, and other features include automatic height adjustment, editable materials table file, and ability to concurrently analyze up to 6 layers of film thickness. Read More

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