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	Jul 24, 2008

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Test & Measuring Instruments -> Meters -> Ellipsometers

Ellipsometers

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Metrology Tools measure thin transparent films.

Rudolph Technologies, Inc.
Flanders, NJ 07836
Jul 10, 2006 Utilizing FOCUS(TM) beam ellipsometry, S3000(TM) (300 mm) and S2000(TM) (200 mm) measure transparent films throughout device fabrication process. Laser light sources are used for optimal accuracy, stability, spot size, and tool-to-tool matching. Also provided, optional deep UV and visible reflectometry capabilities offer flexibility in addressing various applications throughout fabrication. Built on Vanguard(TM) platform, products incorporate Cognex® PatMAX® geometric pattern-matching technology.

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