Aerotech, Inc.    Pittsburgh, PA 15238
Sep 16, 2011 With low profile of 85 mm, Series ANT130-XY offers travels up to 160 x 160 mm with 1 nm resolution, 75 nm repeatability, and 250 nm accuracy/axis. Stages utilize crossed roller bearings and direct-drive technology, which has no hysteresis or backlash, enabling accurate motion in both X and Y dimensions. Applications include data storage, semiconductors, laser micromachining, sensor testing, material deposition, and MEMS/nanotechnology device fabrication.

Steinmeyer Inc.    Bedford, MA 01730
Aug 13, 2009 Weighing 2 kg, Model MP63 combines DC gear motors, rotary encoders, lead screws, and non-contact limit switches in fully enclosed assembly. Unit provides 25 mm stroke in each direction with 5 micron accuracy and ±1 micron repeatability. Standard straightness and flatness is ±3 microns. Cable connectors are located on one end, and, as option, assembly can be made clean room compatible.

Newport Corp.    Irvine, CA 92606
Jul 06, 2009 Driven by 6 LTA actuators, Hexapod 6-axis micropositioning system features anti-friction coated spherical joint design. Hexapod XPS electronic controller offers freely-definable virtual pivot point, instrument grade I/O, hardware-based input triggers, event triggers, high-speed data acquisition, TCP/IP communication, and integrated TCL programming language for on-board processes. Two user-definable coordinate systems are provided, which facilitate incremental displacements.

Physik Instrumente (PI)    Auburn, MA 01501
May 06, 2009 Featuring 0.8 in. profile, PI nano(TM) Series delivers accurate motion with sub-nanometer resolution in 2 and 3 axes. Piezo controller is included and comes with 24-bit USB port, Ethernet, RS-232, and analog interfaces, as well as software support for all major image acquisition packages. For highly stable, closed loop operation, piezoresistive sensors are applied directly to moving structure and precisely measure displacement of stage platform.

Newport Corp.    Irvine, CA 92606
Feb 19, 2009 Available in X/XY/XYZ configurations, NPX linear stages use frictionless guide design. Multi-axis XY and XYZ devices utilize parallel motion principle, ensuring parallel and straight motion up to 400 micron travel. Mounted between microscope and objectives, NPO NanoFocusing stages allow up to 250 micron focusing range. NPA Translators can generate forces up to 1,000 N, while PSM Ultrafast Piezo Steering Mirror provides sub-microradian resolution, tip, tilt, and z-motion for optics.