Gas Cleaning Module cuts laser startup time.

Lambda Physik, Inc.
Fort Lauderdale, FL 33309
Apr 17, 2002 NovaGasPurifier(TM) filtering device for Lambda STEEL(TM) industrial excimer lasers does not require He-compressor or water cooling like company's existing cryogenic gas purification systems, so it does not require 50-min. cool down phase. Instead, it is immediately operational. This cuts start up time, reduces window contamination, and increases average gas lifetimes. Lambda STEEL 1000 and STEEL 670 lasers in field can be easily upgraded with module.