Electron Beam Source

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment

Axcelis Announces Multi System Order for 'Purion M' Implanters from Leading Foundry

November 8, 2016

Systems Will Support High Volume Production of Devices for the Wireless Communications Market

BEVERLY, Mass., Nov. 1, 2016 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced a multi system order for the Company's Purion M™ medium current implanter from a leading manufacturer of devices...Read More

Electrical Equipment & Systems

Axcelis Receives Order for 'Purion XE' From Power Device Chipmaker in European Region

September 12, 2016

Dynamic Growth in Automotive, IoT and Image Sensor Markets Drives Capacity Expansion BEVERLY, Mass. - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received an order for the Purion XE™ high energy implanter from a leading semiconductor manufacturer in the European region. The system...Read More

Electrical Equipment & Systems

Ion Implanter offers extended energy option.

October 19, 2015

Incorporating Purion Contamination Shield™ Defense System, Purion XE™ High Energy Implanter offers metals-free implant process that is designed specifically to address needs of image sensor and specialty device manufacturers. Purion Vector™ dose and angle control system, and constant focal length scanning deliver precise and repeatable dopant placement. In addition, optimized beam current performance combined with Purion™ 500 wph end station maximizes productivity. Read More

Electrical Equipment & Systems

Plasma Focused Ion Beam cuts analysis from days to hours.

June 8, 2015

Built on DualBeam™ Plasma FIB platform with integrated SEM and nanoprobing capabilities, Helios PFIB EFI delivers site-specific sample preparation with in-situ SEM end-pointing and low-beam energy SEM-based transistor characterization. It includes electron-beam absorbed current  for interconnect-level electrical fault isolation and electron-beam induced current analysis for diffusion characterization. By using FEI’s Dx delayering solution, system boosts deprocessing yields for 10 nm devices. Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment

Axcelis Announces Purion Platform Showcase at SEMICON Korea 2015

February 2, 2015

Powerful Platform Quickly Gaining Momentum in Advanced Planar and 3D Device Manufacturing BEVERLY, Mass.,– Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it will showcase its Purion™ Platform of ion implanters at SEMICON Korea 2015. The event, one of the most important technology...Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment

Axcelis Wins Multiple System, Follow-On Order for 'Purion M' and 'Purion XE' to Support Flash Manufacturing Ramp

December 15, 2014

BEVERLY, Mass. –Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system, follow-on order for two Purion Platform products. The order, from one of the world's leading manufacturers of FLASH devices in Asia Pacific, included both a Purion M™ medium current...Read More

Electrical Equipment & Systems, Machinery & Machining Tools

Ion Beam Milling System is offered with VCT docking port.

December 2, 2014

Leica EM TIC 3X is available with docking port that enables transfer at vacuum/cryo conditions with Leica EM VCT100 system. Room-temperature or cryo sections can be taken up directly from ion beam milling system, loaded into vacuum cryo transfer (VCT) system, and transferred to next preparation step. System provides users with surface preparation of hard, soft, porous, heat-sensitive, brittle and/or heterogeneous material for microstructure analysis by means of SEM and AFM. Read More

Electrical Equipment & Systems, Health, Medical and Dental Supplies & Equipment, Mechanical Power Transmission

UK's NHS Supply Chain Selects 10 TrueBeam Treatment Machines to Enable More Advanced Cancer Treatments

October 29, 2014

Order Comes a Year after NHS Supply Chain Ordered 20 TrueBeam Machines CRAWLEY, United Kingdom –NHS Supply Chain has placed an order for a further 10 TrueBeam™ machines from Varian Medical Systems (NYSE: VAR) as part of an ongoing program to replace older machines and roll out modern radiotherapy and radiosurgery treatments for patients in the UK's public hospitals. The order, placed...Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment, Services

Axcelis Announces Order for 'Purion M' Medium Current Implanter from Second Leading Chip Manufacturer

April 22, 2014

Successful Evaluation Exceeded Goals Across Numerous Critical Performance Categories BEVERLY, Mass.– Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has received an order for the Company's next generation Purion M™ medium current implanter from a second leading chipmaker in Asia....Read More

Electrical Equipment & Systems

Power Supplies serve electron-beam coating applications.

April 8, 2014

Comprising 3, 6, and 12 kW variants, rack-mount EVA Series thin film deposition power supplies are tolerant to transient and continuous arcing and utilize rugged IGBT Switch Mode design to limit stored energy and provide optimal regulation and ripple specifications. Arc intervention parameters can be optimized via GUI; adjustable values include arc quench, re-ramp, count, and arc rate limiters. Separate 1U rack-mount filament power controller and external filament transformer are optional.
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Communication Systems & Equipment, Electrical Equipment & Systems, Services

Ion Implanters are suited for advanced 3D devices.

February 18, 2014

Purion M™ mid current implanter, Purion H™ high current implanter, and Purion XE™ high energy implanter are designed for advanced 3D devices. Systems include Purion Contamination Shield™ for lowest particles, undetectable metals, and no energy contamination; Purion Vector™ Dose and Angle Control system for precise and repeatable dopant placement; as well as Purion 500wph endstation cross-platform architecture that promotes productivity and manufacturing flexibility. Read More

Electrical Equipment & Systems

Amtech Announces Contract to Place Its Ion Implant System at the Energy Research Centre of the Netherlands (ECN) - To Be Used in High Efficiency Cell Technology R&D

December 19, 2013

TEMPE, Ariz. - Amtech Systems, Inc. (NASDAQ: ASYS), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, semiconductors, and sapphire and silicon wafers, today announced that its solar subsidiary, Tempress Systems, signed a contract with ECN, a world leader in solar research, to cooperate on the development of low cost, high efficiency...Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment

High Current Implanter delivers precise dopant placement.

December 10, 2013

Supporting manufacture of sub 16 nm planar and 3-D devices, Purion H Single Wafer Implanter features scanned spot beam technology with precision implant angle and dose control to optimize device performance and yield. Process control technology minimizes all forms of contaminants to ensure absolute beam purity. Cross-platform architecture is designed to drive manufacturing flexibility and lower total cost of fab operations. Read More

Electrical Equipment & Systems, Machinery & Machining Tools, Waste Handling Equipment

Sterilizing System utilizes electron beam.

November 14, 2013

Suitable for sterilizing sensitive materials and complex products, SmartDose™ provides controls for simultaneous variable dose distribution, simultaneous dual beam redundancy, uninterrupted temperature controls, and intelligent tooling. Applications include allograft tissue, biomaterials, advanced polymers, drugs/biologics, and hydrogels as well as Teflon, implantables, bioabsorbables, bioresorbables, and combination devices. Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment

Axcelis Announces Order for 'Purion M' Medium Current Implanter

October 7, 2013

Exceeds Customer Expectations, Closing Successful Evaluation with Leading Chip Manufacturer BEVERLY, Mass.– Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has received an order for the Company's innovative, new Purion MTM medium current implanter. The new system is installed at one...Read More

Electrical Equipment & Systems, Health, Medical and Dental Supplies & Equipment, Mechanical Power Transmission, Sensors, Monitors & Transducers

Elekta to Exhibit New Versa HD Radiotherapy System at Annual Radiation Physics Conference

August 6, 2013

First showing of breakthrough linear accelerator at 2013 American Association of Physicists in Medicine (AAPM) Annual Meeting INDIANAPOLIS – AAPM Booth #409 - Elekta's Versa HD™* will make its AAPM debut at the association's 55(th) Annual Meeting and Exhibition, August 4-8 at Indianapolis's Indiana Convention Center. It will be the first time that Elekta showcases Versa HD at a scientific...Read More

Electrical Equipment & Systems, Materials & Material Processing, Services, Welding Equipment & Supplies

Sciaky, Inc., Leading Provider of Large-Scale EB Welding Systems and Additive Manufacturing Solutions, Enters Partnership with EVOBEAM GmbH, Leading Provider of Small-Scale, High-Volume EB Welding Systems

May 28, 2013

Agreement between Sciaky and EVOBEAM offers manufacturers a wide range of EB welding options to meet nearly any requirement, from rapid production of small parts to building high-value, large-scale components CHICAGO– Sciaky, Inc., a subsidiary of Phillips Service Industries (PSI) and leading provider of additive manufacturing solutions, announced today that it has entered into a business...Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment, Mechanical Power Transmission

Single Wafer High Energy Implanter offers precision, throughput.

May 9, 2013

Incorporating single wafer LINAC technology, Purion XE ion implanter enables high-yield manufacture of sub-16 nm planar and 3D devices. System incorporates 500+ wafers/hr end station and advanced filtration systems. Latter optimize beam purity, while angle control system and constant focal length scanning deliver precise and repeatable dopant placement. Scanned spot beam architecture enables control of damage engineering as well as other advanced processes. Read More

Electrical Equipment & Systems, Health, Medical and Dental Supplies & Equipment, Laboratory and Research Supplies & Equipment, Mechanical Power Transmission, Optics & Photonics

U.K. Clinic Anticipating New Era of Radiotherapy Speed and Precision with Elekta's New Versa HD System

April 15, 2013

The Christie NHS Foundation Trust to harness new linear accelerator to improve therapy for patients with head-and-neck, lung and prostate cancers MANCHESTER, England– Featuring a revolutionary combination of speed and accuracy, Elekta's new Versa HD™ system will help clinicians at The Christie NHS Foundation Trust (Withington, Manchester) maximize the precision of therapeutic beams on the...Read More

Electrical Equipment & Systems, Laboratory and Research Supplies & Equipment, Machinery & Machining Tools

Axcelis 'Purion M' Medium Current Implanter Selected by Leading Chipmaker for Memory and Flash Device Manufacturing

March 14, 2013

System Delivers Industry Leading Purity, Precision and Productivity for the Sub 2Xnm Era BEVERLY, Mass. - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today the Company's innovativePurion M™ medium current implanter has been selected by another one of the world's leading chipmakers. The...Read More