Sierra Instruments, Inc.
Monterey, CA 93940
Apr 27, 2009 Coupled with Smart-Trak® mass flow meters (MFMs) and controllers (MFCs), Compod(TM) programmable control module simplifies basic flow control installations and permits networking of multiple instruments using open-source MODBUS RTU protocol. Dual digital outputs and one analog input can be configured by end-user various process controls. System also monitors functionality of MFM/MFC and includes diagnostic as well as fault/update notification capabilities.

Bronkhorst Cori-Tech B.V.
Ruurlo   Netherlands
Apr 22, 2009 Offering integrated PID control and close-coupled control valves or pumps, mini CORI-FLOW® suits applications in both liquid and gas flow. Unit provides analogue and RS-232 communication, optional fieldbus interfaces, alarms, totalizer to measure fluid consumption, and batch dosing, and features fluid temperature and density as secondary digital outputs. Available with IP65 weatherproof housing, it is ATEX Cat.3 Zone 2 approved for use in hazardous areas.

Brooks Instrument
Hatfield, PA 19440
Apr 06, 2009 Built on standard 1.125 in. wide platform with user interface and local digital display, B-Series is designed to be insensitive to fluctuations in pressure and temperature. It actively measures line pressure and adjusts control valve, and has output characterized over full operating temperature range of device. Employing self-diagnostic routines, unit alerts user with alarm code in event of diagnostic fault, and also features service port for additional diagnostic capability.

Sierra Instruments, Inc.
Monterey, CA 93940
Feb 02, 2009 With accuracy of ±1% of FS and repeatability of ±0.2% of FS, Max-Trak® Model 180 + Flanges is available with 316 stainless steel (ANSI or DIN) flange mounting for gas flow rates up to 1,000 SLPM (pipe sizes up to 1 in.). It features linear design, platinum sensor technology, and can communicate to user workstation via RS-232, RS-485, or one of 4 analog signals. NEMA 6/IP67 rated unit suits applications including metals and ceramics manufacturing and chemical processing.

Celerity Group
Tualatin, OR 97062
Jan 27, 2009 Series GC100 ditital mass flow controller (MFC) is used to measure and control gases in applications such as process gas control in solar cell manufacturing, glass and web coating, plasma cleaning, PEM fuel cell gas control, and bioreactor gas management. MFC offers user-configurability that eliminates need for individual gas and range calibrations, and intelligent embedded diagnostics, service port, and software for efficient on-tool maintenance are also included.

Celerity Group
Tualatin, OR 97062
Jan 27, 2009 Featuring pressure transient insensitive flow technology, GF100 Series is designed to precisely measure, monitor, and control ultra high purity process gas chemistry in semiconductor device and solar cell manufacturing processes. RoHS-compliant units offer in-situ electronic reconfiguration of gas and flow range, as well as intelligent embedded diagnostics, service port, and software for on-tool maintenance.

Brooks Instrument
Hatfield, PA 19440
Apr 09, 2008 Featuring digital communications via built-in RS-232 protocol, Model 4800 Mass Flow Meter/Controller allows users to provide setpoint and receive process value, select one of 9 gases for calibration curve, access valve override function, and access re-zero function. Optional downport connection allows for top mounting to facilitate maintenance and installation while also offering space savings because there is no point-to-point tubing necessary.

Bronkhorst USA Inc.
Bethlehem, PA 18017
Jul 11, 2007 BRIGHT Series offers local indication and operation, flow rate in actual values/percentage, fluid selection, setpoint, counter, and alarms. Modules are designed for lab-style instruments and for instruments with IP65 housing. Communication between such instruments and product is established over RS-232 digital communication port. OLED display technology offers bright and wide angle visibility. Units can be mounted directly on instrument, adjacent wall/panel, or instrument's pipework.

Brooks Instrument
Hatfield, PA 19440
Jan 23, 2007 Brooks® Model 4800 Series Mass Flow Meters and Controllers feature Micro Electro Mechanical System sensor to deliver response to changes in gas flow rate. Allowing gas to flow directly across sensor, compact, modular instruments provide measurement and control of air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, CH3H6, and C3H8. Model 4850 mass flow controller uses PID algorithm to optimize control valve response, and match actual mass flow to changes in setpoint.

MKS
Andover, MA 01810 2449
Nov 06, 2006 Low Pressure πMFC offers precise control of gas flows from 1-20 sccm over wide pressure range with source gas delivery pressure as low as 4 torr. Controller can be configured for different primary implant gases such as arsine, phosphine, and boron trifluoride, and valve and sensor designs offer zero stability and accuracy for all flow conditions. Targeted for semiconductor ion implant applications, MFC footprint and control I/O are compatible with existing gas lines.

Brooks Instrument
Hatfield, PA 19440
Aug 02, 2006 Available on Model 7950S Mass Flow Controller, Zero Drift Diagnostic tool monitors flow signal during no-flow conditions. Alarms notify user when out-of-limits condition has been detected. Zero drift can be accurately detected because diagnostic has ability to monitor both positive and negative flow signals. Configuration tool application is provided that allows user to customize Zero Drift Diagnostic using PC connected to Model 7950S service port.

Bronkhorst High-Tech BV
NL-7261 AK   Netherlands
Sep 28, 2005 Combined with integrated or close-coupled control valves, IP65-rated IN-FLOW Series measures and controls gas flow within range of 0.2 ml_n/min to 11,000 m³_n/h air-equivalent. Units are ATEX approved for use in Category 3, Zone 2 hazardous areas. Basic PC board contains all general functions including alarm, totalization, and diagnostic functions, as well as analog I/O signals and RS232 connection. DeviceNet(TM), Profibus-DP®, Modbus, or FLOW-BUS protocol can be added.

Advanced Energy Industries Inc.
Fort Collins, CO 80525
Jul 15, 2005 Featuring multi-gas, multi-range functionality, Aera® PI-980â„¢ series helps improve processes for etch, CVD, PVD, and diffusion in semiconductor applications. Mass flow controller (MFC) promotes gas-flow stability and provides real-time process control. Combining NeuralStepâ„¢ control technology with integrated pressure transducer, series increases speed of MFC response, eliminating effects of upstream and downstream pressure disturbances.

Cole-Parmer Instrument Co.
Vernon Hills, IL 60061
Apr 27, 2005 Universal Mass Flow Control System allows user to monitor 4 flowmeters or flow controllers from anywhere Internet-connected PC is available. Each flowmeter channel features totalizer and dedicated alarm, and there are 2 dedicated relay outputs per controller. Batch control program allows execution of up to 16 steps in batch process, while flow control program directs flow control through user-defined series of up to 96 steps, ramping flow rates up, down, on, or off.

Advanced Energy Industries Inc.
Fort Collins, CO 80525
Apr 12, 2004 Area® Transformerâ„¢ digital, multi-gas, multi-range MFCs provide field programmability to run any gas for any gas flow range from 10 sccm to 30 slm. As few as 8 different models can be used to support fab's requirements. Units allow unlimited gas selection without recalibration and can be pulled directly from customer's inventory shelf and programmed to meet requirements.

Emerson Process Management, Intellution Division
St. Louis, MO 63136 8506
Mar 26, 2004 Capable of controlling liquids and gases, Brooks Instrument QUANTIM Coriolis meter and controller utilizes modular hardware platform using sensing tube geometries and optical sensing techniques. Modular hardware platform allows product to measure and control flows from 1–28,000 g/hr. Equipped with integrated sensor, transmitter, valve, and control electronics, unit allows users to control liquids or gases without switching meters or recalibrating device.

Emerson Process Management, Intellution Division
St. Louis, MO 63136 8506
Jun 03, 2003 Elastomer-seal, 2-position, Downport Brooks® MFC integrates with surface-mount components for industrial applications. Product locks into 1½ in. ports and occupies only 2 positions on substrate system. Unit connects to components without need for adaptor plates. Elastomer surface-mount components, based on Integrated Gas Component, allow users to gather data directly from sample point in analytical systems.

Emerson Process Management
Knoxville, TN 37932
Apr 28, 2003 Brooks Instrument Mf Series incorporates IP65/NEMA 4X housing to protect it in hose-down and corrosive environments. Suited for biotech and pharmaceutical gas delivery systems, product is available with analog or digital electronics and may be specified with DeviceNetâ„¢ or PROFIBUSâ„¢ DP digital communications. Offerings include built-in monitoring and on-line diagnostics capabilities, elastomeric seals, and optional explosion-proof housing.

Aalborg Instruments & Controls, Inc.
Orangeburg, NY 10962
Feb 13, 2003 CE compliant, AF Thermal Mass Flowmeters and Controllers use straight tube sensors to ensure laminar gas flow. Materials in contact with gases are stainless steel and Vitonâ„¢ O-rings. PC boards have built-in polarity reversal protection, and resettable fuses provide power input protection. Response time is typically 1 sec to within ±2% of flow setting. Units provide 0–5 Vdc output and ±1% full scale accuracy. Maximum gas pressure is 500 psig.

Pneucleus Technologies LLC
Hollis, NH 03049
Feb 03, 2003 MicroFlo miniature mass flow controller features InSitu-Senseâ„¢ sensing technology, which incorporates microchip-sized, in-line flow transducer to achieve repeatable and stable flow regulation in 40 msec. It is specifically for gases used in chromatography, elemental analyzers, gas detectors, gas monitoring, and vacuum coating applications.