Mass Flow Controllers
Operating on systems up to 320 psia, MQ Series Flow Meters and MCQ Series Mass Flow Controllers measure mass flow rate, volumetric flow rates, and pressures. Units provide 10 ms sensor response speeds and sub-100 ms control response times. Preloaded with up to 98 on-board gas calibrations, instruments feature multivariate interface displays, as well as serial and analog connections. Each comes with NIST-traceable calibration certificate demonstrating 2% FS accuracy. Read More
Able to manage industrial processes with chaotic upstream fluctuations, MCRH accommodates flow rates up to 5,000 slpm with pressure drop of 12.1 psig FS and without compromising speed or precision of gas control. Stable and programmable unit, available with digital and analog communications options, has optimized flow geometry and precisely and rapidly controls mass flow rate, volumetric flow rate, or back pressure of gases. Dual valve design enables 100 msec control response time.
Designed to accurately measure and control gas flow in wide variety of demanding applications, Digital 300 Series is accurate to better than ±0.5% of reading +0.2% of full scale for full scale flow rates from 0–10 sccm to 0–10,000 slm. Controller use thermal-based mass flow sensor that provides optimized linear response to changing flow rates. In addition, electronics associated with each sensor are precisely tuned to give fast response times. Read More
Designed for original equipment manufacture and process integration, 20SLPM BASIS™ model controls gas flow rates. BASIS series, featuring instant on technology, offers models with FS at 100 cm³/min and 1 or 20 Lpm. Models perform at full accuracy within 70 msec, and 100 msec control response enables real-time reaction to upstream fluctuations. Multi-gas and single-gas units offer NIST-traceable accuracy of ±(1.5% of reading + 0.5% FS) as well as multiple communications options. Read More
New user-selectable engineering units, better control and faster data with new control software Tucson, Arizona – Alicat Scientific has updated its Gas Select™ firmware for Alicat mass flow meters, mass flow controllers and pressure controllers. Gas Select 6.0 improves user control and data speed, adding features that enable users to make changes to instruments without a factory visit. ...Read More
HAMPTON, VA. - Teledyne Hastings Instruments announces the release of their new Windows™ based software for use with the Digital 300 Series line of thermal mass flow instruments. The software allows the user to control, observe, and record real-time flow data. The free software is flexible and provides windows for flow rate, setpoint control, graphical data visualization, flow totalization,...Read More
Aalborg Instruments' ZFM Mass Flow Meters and Controllers combine intelligence, user convenience, and outstanding flow performance. Aalborg Instruments' ZFM Mass Flow Meters and Controllers are designed for multi-gas/multi-range functionality up to 8 bar (currently 6 gases) and a standard accuracy of (0.5% RD + 0.2% FS) based on actual calibration. By connecting the instrument to the...Read More
Ready to control process flows at full accuracy in 70 ms, BASIS™ Flow Controllers are suited for OEM gas analyzers, automated gas mixing, and anywhere mass flow-only control is required. With 100 ms control response, units can react in real-time to upstream fluctuations. Controllers are available with following multi-gas calibrations: Air, Ar, CO2, N2, O2, N2O (selectable over RS-485); He, H2 are also available in single-gas units. NIST-traceable accuracy is ±1.5% of reading +0.5% FS. Read More
Tucson, Arizona– Alicat’s Whisper series of mass flow meters and controllers have taken the “Best Product” prize in an innovation competition run by its parent company, Halma plc. The Halma Innovation Awards recognizes advancements made by Halma subsidiaries that demonstrate creative new ways to improve a company’s products or operations. The Innovation Awards stem from Halma’s...Read More
Respectively offering full scale flow rate capabilities to 250, 500, and 1,000 slm, I-250/-500/-1000 provide mass flow control for large-scale production processes. These products, available as MFCs and MFMs, carry IP66 rating. Along with digital mass flow control electronics, features include thermal sensor and mechanical design that provide 1% of setpoint accuracy and precise control for full scale flow rates. Multi-gas/multi-range capability is enabled via onboard Ethernet interface. Read More
Aalborg Instruments' upgraded Mass Flow GFM Meters and GFC Controllers, designed respectively to read or set gas flow rates, now include upgraded features that enhance the products' performance without impacting the cost. Compact and self-contained, both product lines offer instrumentation grade 1% accuracy for models up to 100 liters. GFM and GFC models are constructed of aluminum...Read More
Sensirion stands for innovative products, customer-specific solutions and excellent support. The company's products continually set new standards in various markets across the globe. At this year's COMPAMED trade fair, Sensirion is presenting new and enhanced sensor solutions for measuring gas and liquid flow rates and differential pressure. Visit Sensirion's booth to find out more...Read More
High-purity GF101 as well as ultra high-purity GF121 and GF126 deliver accuracy and response time suited for gas flow control in semiconductor and LED manufacturing processes. Designed for process applications that include high-flow purge, epitaxial, and blanket gas control, these controllers provide flow rates up to 300 slpm N2 equivalent. Multiple digital and analog I/O interface options support various communication protocols, and readout screens rotate 180° to facilitate viewing. Read More
MCD Series offers user-selectable control modes that allow users to switch between mass flow, volumetric flow, and absolute pressure measurement and control for flexibility during laboratory use. With dedicated inlet valve and dedicated exhaust valve, single unit can control upstream and downstream flows as well as positive pressure or backpressure in both open and closed systems. Full scale mass flow rates are available from ±0.5 sccm to ±3,000 slpm.
Used for gas flow rates up to 300 slpm, GF81 has all-metal seal flow path that allows handling of almost any gas – including corrosive and hazardous gases. Minimized footprint and power draw enables design of smaller, more efficient systems; sensor fosters stable, accurate, and repeatable mass flow measurement; and digital and analog I/O options offer range of communication protocols. MFC suits high-flow applications in thin film, solar, analytical, biotech, and fuel cell applications.
Based on laminar flow technology, Whisper series meets needs of process industries with systems using low pressure differentials or exotic gases. Flow body design and sensor achieve differential pressure range of .01–2.0 psid, depending on flow rate/configuration. Compatible with 30 field-selectable gases and gas mixes, products operate standalone or integrated into process control instrumentation. In addition to mass flow, single device measures pressure, temperature, and volumetric flow. Read More
HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a "normally open" valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan,...Read More
Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities that verify accuracy, check valve leak-by, and monitor sensor drift, semiconductor manufacturers can maintain uniformity in etch profiles and critical dimensions. Read More
Designed to resist liquid/dust ingress, I-Series Mass Flow Controllers are general purpose, metal or elastomer-sealed instruments available with analog or digital I/O. Digital flow control electronics and patented thermal sensor provide 1% set point accuracy and precise flow control for full scale flow rates from 5 sccm to 50 slm or 100–250 slm, depending on model. Multi-gas/multi-range capability, enabled through onboard Ethernet interface, lets user change device gas and range. Read More
Featuring digital control architecture, P-Series/G-Series MFCs use embedded web browser application for changes in gas type and full scale flow. P-Series models, with full scale ranges from 5 sccm to 240 slm, are suited for critical mass flow applications. With integral pressure transducer, units offer pressure insensitive capabilities that maintain tight flow control in event of upstream pressure disturbance. G-Series models are intended for applications where 10 sccm to 50 slm FS range is required. Read More