Mass Flow Controllers

Controls & Controllers, Test & Measuring Instruments

Mass Flow Meters and Controllers suit high pressure systems.

September 26, 2016

Operating on systems up to 320 psia, MQ Series Flow Meters and MCQ Series Mass Flow Controllers measure mass flow rate, volumetric flow rates, and pressures. Units provide 10 ms sensor response speeds and sub-100 ms control response times. Preloaded with up to 98 on-board gas calibrations, instruments feature multivariate interface displays, as well as serial and analog connections. Each comes with NIST-traceable calibration certificate demonstrating 2% FS accuracy. Read More

Controls & Controllers

Mass Flow Controller performs accurately in high-volume processes.

August 26, 2016

Able to manage industrial processes with chaotic upstream fluctuations, MCRH accommodates flow rates up to 5,000 slpm with pressure drop of 12.1 psig FS and without compromising speed or precision of gas control. Stable and programmable unit, available with digital and analog communications options, has optimized flow geometry and precisely and rapidly controls mass flow rate, volumetric flow rate, or back pressure of gases. Dual valve design enables 100 msec control response time.
Read More

Controls & Controllers

Digital Flow Controllers measure flow from 20 sccm to 5 slm.

May 17, 2016

Designed to accurately measure and control gas flow in wide variety of demanding applications, Digital 300 Series is accurate to better than ±0.5% of reading +0.2% of full scale for full scale flow rates from 0–10 sccm to 0–10,000 slm. Controller use thermal-based mass flow sensor that provides optimized linear response to changing flow rates. In addition, electronics associated with each sensor are precisely tuned to give fast response times. Read More

Controls & Controllers

Mass Flow Controller delivers instant-on, real-time operation.

May 16, 2016

Designed for original equipment manufacture and process integration, 20SLPM BASIS™ model controls gas flow rates. BASIS series, featuring instant on technology, offers models with FS at 100 cm³/min and 1 or 20 Lpm. Models perform at full accuracy within 70 msec, and 100 msec control response enables real-time reaction to upstream fluctuations. Multi-gas and single-gas units offer NIST-traceable accuracy of ±(1.5% of reading + 0.5% FS) as well as multiple communications options. Read More

Controls & Controllers, Software

Teledyne Hastings Instruments Announces New Digital 300 Series Mass Flow Control Software

April 6, 2016

HAMPTON, VA.  - Teledyne Hastings Instruments announces the release of their new Windows™ based software for use with the Digital 300 Series line of thermal mass flow instruments. The software allows the user to control, observe, and record real-time flow data. The free software is flexible and provides windows for flow rate, setpoint control, graphical data visualization, flow totalization,... Read More

Controls & Controllers, Fluid & Gas Flow Equipment, Sensors, Monitors & Transducers, Test & Measuring Instruments

Alicat Releases Gas Select 6.0 Firmware for its Mass Flow Meters and Controllers

April 6, 2016

New user-selectable engineering units, better control and faster data with new control software Tucson, Arizona – Alicat Scientific has updated its Gas Select™ firmware for Alicat mass flow meters, mass flow controllers and pressure controllers. Gas Select 6.0 improves user control and data speed, adding features that enable users to make changes to instruments without a factory visit. ... Read More

Controls & Controllers, Test & Measuring Instruments

Intelligent Mass Flow Meters and Controllers

November 27, 2015

Aalborg® Instruments' ZFM Mass Flow Meters and Controllers combine intelligence, user convenience, and outstanding flow performance. Aalborg Instruments' ZFM Mass Flow Meters and Controllers are designed for multi-gas/multi-range functionality up to 8 bar (currently 6 gases) and a standard accuracy of ±(0.5% RD + 0.2% FS) based on actual calibration. By connecting the instrument to... Read More

Controls & Controllers

Mass Flow Controllers target OEMs and process lines.

June 15, 2015

Ready to control process flows at full accuracy in 70 ms, BASIS™ Flow Controllers are suited for OEM gas analyzers, automated gas mixing, and anywhere mass flow-only control is required. With 100 ms control response, units can react in real-time to upstream fluctuations. Controllers are available with following multi-gas calibrations: Air, Ar, CO2, N2, O2, N2O (selectable over RS-485); He, H2 are also available in single-gas units. NIST-traceable accuracy is ±1.5% of reading +0.5% FS. Read More

Controls & Controllers, Fluid & Gas Flow Equipment, Sensors, Monitors & Transducers, Test & Measuring Instruments

Alicat Scientific's Whisper Series Wins Global Innovation Award

May 27, 2015

Tucson, Arizona – Alicat’s Whisper series of mass flow meters and controllers have taken the “Best Product” prize in an innovation competition run by its parent company, Halma plc. The Halma Innovation Awards recognizes advancements made by Halma subsidiaries that demonstrate creative new ways to improve a company’s products or operations. The Innovation Awards stem from Halma’s... Read More

Controls & Controllers, Test & Measuring Instruments

Coriolis Mass Flow Meters feature EtherCAT capability.

April 21, 2015

Suited for research or production processes, mini CORI-FLOW™ ML120 Series Coriolis Mass Flow Meters and Controllers offer flow ranges from 50 mg/h to 200 g/h, with accuracy of 0.2% of reading. Mass Flow Controller features microprocessor-based PC-board with signal and fieldbus conversion, and integrated digital controller utilizing piezoelectric control valve. Meters/Controllers are available with analog and digital communication, RS232, and various fieldbus options. Read More

Controls & Controllers

Mass Flow Controllers support rates to 1,000 slm.

March 5, 2015

Respectively offering full scale flow rate capabilities to 250, 500, and 1,000 slm, I-250/-500/-1000 provide mass flow control for large-scale production processes. These products, available as MFCs and MFMs, carry IP66 rating. Along with digital mass flow control electronics, features include thermal sensor and mechanical design that provide 1% of setpoint accuracy and precise control for full scale flow rates. Multi-gas/multi-range capability is enabled via onboard Ethernet interface. Read More

Controls & Controllers, Sensors, Monitors & Transducers, Test & Measuring Instruments

Economical ±1% Accuracy Mass Flow Meters and Controllers

January 15, 2015

Aalborg® Instruments' upgraded Mass Flow GFM Meters and GFC Controllers, designed respectively to read or set gas flow rates, now include upgraded features that enhance the products' performance without impacting the cost. Compact and self-contained, both product lines offer instrumentation grade ±1% accuracy for models up to 100 liters. GFM and GFC models are constructed of... Read More

Controls & Controllers, HVAC, Sensors, Monitors & Transducers

Sensirion at the COMPAMED 2014 Trade Fair (Hall 8a, Booth H19.6)

October 9, 2014

Sensirion stands for innovative products, customer-specific solutions and excellent support. The company's products continually set new standards in various markets across the globe. At this year's COMPAMED trade fair, Sensirion is presenting new and enhanced sensor solutions for measuring gas and liquid flow rates and differential pressure. Visit Sensirion's booth to find out more... Read More

Controls & Controllers

Mass Flow Controllers serve semiconductor, LED applications.

August 6, 2014

High-purity GF101 as well as ultra high-purity GF121 and GF126 deliver accuracy and response time suited for gas flow control in semiconductor and LED manufacturing processes. Designed for process applications that include high-flow purge, epitaxial, and blanket gas control, these controllers provide flow rates up to 300 slpm N2 equivalent. Multiple digital and analog I/O interface options support various communication protocols, and readout screens rotate 180° to facilitate viewing. Read More

Controls & Controllers, Sensors, Monitors & Transducers, Test & Measuring Instruments

Mass Flow Controller operates in harsh environments.

February 14, 2014

Part of IN-FLOWCTA Series for industrial applications, Model T23 works on basis of direct through-flow measurement, following constant temperature anemometry principle. Unit features direct operating valve that can cope with high gas flow rates and has max flow control range of 12–600 ln/min. Available with both analog I/O signals and RS232 connection as standard, controller also supports integration of interface board with DeviceNet™, PROFIBUS DP, Modbus, or FLOW-BUS protocol. Read More

Controls & Controllers

Mass Flow/Pressure Controllers have flexible dual-valve design.

January 24, 2014

MCD Series offers user-selectable control modes that allow users to switch between mass flow, volumetric flow, and absolute pressure measurement and control for flexibility during laboratory use. With dedicated inlet valve and dedicated exhaust valve, single unit can control upstream and downstream flows as well as positive pressure or backpressure in both open and closed systems. Full scale mass flow rates are available from ±0.5 sccm to ±3,000 slpm.
Read More

Controls & Controllers, Green & Clean

Thermal Mass Flow Controller features 5.28 in. length.

July 19, 2013

Used for gas flow rates up to 300 slpm, GF81 has all-metal seal flow path that allows handling of almost any gas – including corrosive and hazardous gases. Minimized footprint and power draw enables design of smaller, more efficient systems; sensor fosters stable, accurate, and repeatable mass flow measurement; and digital and analog I/O options offer range of communication protocols. MFC suits high-flow applications in thin film, solar, analytical, biotech, and fuel cell applications.
Read More

Controls & Controllers, Test & Measuring Instruments

Mass Flow Meters/Controllers helps conserve expensive gases.

May 6, 2013

Based on laminar flow technology, Whisper series meets needs of process industries with systems using low pressure differentials or exotic gases. Flow body design and sensor achieve differential pressure range of .01–2.0 psid, depending on flow rate/configuration. Compatible with 30 field-selectable gases and gas mixes, products operate standalone or integrated into process control instrumentation. In addition to mass flow, single device measures pressure, temperature, and volumetric flow. Read More

Controls & Controllers, Test & Measuring Instruments

Brooks Instrument Launches Upgrades to GF 40/80 Series Thermal Mass Flow Controllers

May 2, 2013

HATFIELD, Pa. – Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a "normally open" valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan,... Read More

Controls & Controllers, Machinery & Machining Tools

Mass Flow Controller aids semiconductor manufacturers.

April 30, 2013

Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities that verify accuracy, check valve leak-by, and monitor sensor drift, semiconductor manufacturers can maintain uniformity in etch profiles and critical dimensions. Read More