Alicat Scientific, Inc.    Tucson, AZ 85745
May 06, 2013 Based on laminar flow technology, Whisper series meets needs of process industries with systems using low pressure differentials or exotic gases. Flow body design and sensor achieve differential pressure range of .01–2.0 psid, depending on flow rate/configuration. Compatible with 30 field-selectable gases and gas mixes, products operate standalone or integrated into process control instrumentation. In addition to mass flow, single device measures pressure, temperature, and volumetric flow.

Brooks Instrument    Hatfield, PA 19440
Apr 30, 2013 Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities that verify accuracy, check valve leak-by, and monitor sensor drift, semiconductor manufacturers can maintain uniformity in etch profiles and critical dimensions.

MKS Instruments Inc. / UTI Division    Walpole, MA 02081
Apr 23, 2013 Designed to resist liquid/dust ingress, I-Series Mass Flow Controllers are general purpose, metal or elastomer-sealed instruments available with analog or digital I/O. Digital flow control electronics and patented thermal sensor provide 1% set point accuracy and precise flow control for full scale flow rates from 5 sccm to 50 slm or 100–250 slm, depending on model. Multi-gas/multi-range capability, enabled through onboard Ethernet interface, lets user change device gas and range.

MKS    Andover, MA 01810 2449
Jul 19, 2012 Featuring digital control architecture, P-Series/G-Series MFCs use embedded web browser application for changes in gas type and full scale flow. P-Series models, with full scale ranges from 5 sccm to 240 slm, are suited for critical mass flow applications. With integral pressure transducer, units offer pressure insensitive capabilities that maintain tight flow control in event of upstream pressure disturbance. G-Series models are intended for applications where 10 sccm to 50 slm FS range is required.

Sierra Instruments, Inc.    Monterey, CA 93940
Apr 12, 2012 Equipped with Frictionless-Hovering Valve Technology(TM) featuring shut-off capability, SmartTrak® 100 provides stable gas mass flow control. High pressure meter utilizes inherently linear Laminar Flow Element and advanced platinum sensor technology. User can independently adjust calibration in field for any of 10 pre-programmed Dial-A-Gas® gases. With Pilot Module control/readout interface, user can view and adjust critical control functions at any time.

Aalborg Instruments    Orangeburg, NY 10962
Feb 28, 2012 Aalborg®'s TIO totalizer can be used as monitor for GFM and AFM flow meters or as controller with GFCs and AFCs. It converts analog mass flow meters and controllers into precision digital units via RS 232 or RS 485 interfaces (multi-drop capacity up to 64 devices). Two fully independent programmable totalizers allow up to 9 digit total readings and are updated every 100 msec. Totalizer can be used with third party devices with 0-5 Vdc / 4-20 mA inputs and outputs.

Brooks Instrument    Hatfield, PA 19440
Dec 15, 2011 Offering configurable platform based on modular architecture, Models GF40/GF80 are suited for gas flow measurement and control applications. Units feature corrosion-resistant Hastalloy sensor tube for stability, independent diagnostic/service port, and valve technology that provides minimum leak-by and maximum turndown. MultiFlo(TM) technology gives users ability to reconfigure controllers for new gas and range without removing device from gas line.

Syrris Ltd.    Royston SG8 5HW  United Kingdom
Aug 24, 2010 Designed for applications where elevated pressures are required, Atlas Potassium Pressure System offers glass vessels ranging from 100 mL to 3 L which can be changed in less than 1 min. Controlled automatically or manually, PED/ASME compliant, modular 3 bar pressure reactor features burst disc and pressure relief valve for safety. Operation modes include manual pressure control, automatic pressure maintenance, pressure control with mass flow monitoring, mass flow control, and off gas monitoring.

Brooks Instrument    Hatfield, PA 19440
Aug 20, 2010 Modular and user-programmable, ultra-high purity GF Series employs MultiFlo(TM) technology that facilitates reprogramming of gas and full scale (FS) range in less than 30 sec without removal from gas line. Accuracy is optimized via application of gas modeling and compensation for non-ideal/non-linear gases. Along with flow settling times from 300 msec to 1 sec, controllers feature all-metal flow path, NO or NC valves, and multiple communication protocols.

Alicat Scientific, Inc.    Tucson, AZ 85745
May 10, 2010 Featuring internally compensated laminar flow technology, Alicat Mass Flow Controllers can operate at flow rates from 0.5-50 sccm full scale with control range of 1-100%. Control response time is less than 100 msec with 1% accuracy. Units include display that allows user to view device status, change values of PID control loop, and view parameters. They are NIST- and CE-certified and have standard 14 gas user-selectable calibration.

Sierra Instruments, Inc.    Monterey, CA 93940
Apr 27, 2009 Coupled with Smart-Trak® mass flow meters (MFMs) and controllers (MFCs), Compod(TM) programmable control module simplifies basic flow control installations and permits networking of multiple instruments using open-source MODBUS RTU protocol. Dual digital outputs and one analog input can be configured by end-user various process controls. System also monitors functionality of MFM/MFC and includes diagnostic as well as fault/update notification capabilities.

Bronkhorst Cori-Tech B.V.    Ruurlo   Netherlands
Apr 22, 2009 Offering integrated PID control and close-coupled control valves or pumps, mini CORI-FLOW® suits applications in both liquid and gas flow. Unit provides analogue and RS-232 communication, optional fieldbus interfaces, alarms, totalizer to measure fluid consumption, and batch dosing, and features fluid temperature and density as secondary digital outputs. Available with IP65 weatherproof housing, it is ATEX Cat.3 Zone 2 approved for use in hazardous areas.

Brooks Instrument    Hatfield, PA 19440
Apr 06, 2009 Built on standard 1.125 in. wide platform with user interface and local digital display, B-Series is designed to be insensitive to fluctuations in pressure and temperature. It actively measures line pressure and adjusts control valve, and has output characterized over full operating temperature range of device. Employing self-diagnostic routines, unit alerts user with alarm code in event of diagnostic fault, and also features service port for additional diagnostic capability.

Sierra Instruments, Inc.    Monterey, CA 93940
Feb 02, 2009 With accuracy of ±1% of FS and repeatability of ±0.2% of FS, Max-Trak® Model 180 + Flanges is available with 316 stainless steel (ANSI or DIN) flange mounting for gas flow rates up to 1,000 SLPM (pipe sizes up to 1 in.). It features linear design, platinum sensor technology, and can communicate to user workstation via RS-232, RS-485, or one of 4 analog signals. NEMA 6/IP67 rated unit suits applications including metals and ceramics manufacturing and chemical processing.

Celerity Group    Tualatin, OR 97062
Jan 27, 2009 Series GC100 ditital mass flow controller (MFC) is used to measure and control gases in applications such as process gas control in solar cell manufacturing, glass and web coating, plasma cleaning, PEM fuel cell gas control, and bioreactor gas management. MFC offers user-configurability that eliminates need for individual gas and range calibrations, and intelligent embedded diagnostics, service port, and software for efficient on-tool maintenance are also included.

Celerity Group    Tualatin, OR 97062
Jan 27, 2009 Featuring pressure transient insensitive flow technology, GF100 Series is designed to precisely measure, monitor, and control ultra high purity process gas chemistry in semiconductor device and solar cell manufacturing processes. RoHS-compliant units offer in-situ electronic reconfiguration of gas and flow range, as well as intelligent embedded diagnostics, service port, and software for on-tool maintenance.

Brooks Instrument    Hatfield, PA 19440
Apr 09, 2008 Featuring digital communications via built-in RS-232 protocol, Model 4800 Mass Flow Meter/Controller allows users to provide setpoint and receive process value, select one of 9 gases for calibration curve, access valve override function, and access re-zero function. Optional downport connection allows for top mounting to facilitate maintenance and installation while also offering space savings because there is no point-to-point tubing necessary.

Bronkhorst USA Inc.    Bethlehem, PA 18017
Jul 11, 2007 BRIGHT Series offers local indication and operation, flow rate in actual values/percentage, fluid selection, setpoint, counter, and alarms. Modules are designed for lab-style instruments and for instruments with IP65 housing. Communication between such instruments and product is established over RS-232 digital communication port. OLED display technology offers bright and wide angle visibility. Units can be mounted directly on instrument, adjacent wall/panel, or instrument's pipework.

Brooks Instrument    Hatfield, PA 19440
Jan 23, 2007 Brooks® Model 4800 Series Mass Flow Meters and Controllers feature Micro Electro Mechanical System sensor to deliver response to changes in gas flow rate. Allowing gas to flow directly across sensor, compact, modular instruments provide measurement and control of air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, CH3H6, and C3H8. Model 4850 mass flow controller uses PID algorithm to optimize control valve response, and match actual mass flow to changes in setpoint.

MKS    Andover, MA 01810 2449
Nov 06, 2006 Low Pressure πMFC offers precise control of gas flows from 1-20 sccm over wide pressure range with source gas delivery pressure as low as 4 torr. Controller can be configured for different primary implant gases such as arsine, phosphine, and boron trifluoride, and valve and sensor designs offer zero stability and accuracy for all flow conditions. Targeted for semiconductor ion implant applications, MFC footprint and control I/O are compatible with existing gas lines.