PVD System aids 300 mm power device manufacturing.

Press Release Summary:



With options that include modules for frontside thick aluminum processing and backside metal deposition on ultra-thin wafers, Sigma fxP addresses challenges faced while scaling power physical vapor deposition (PVD) processes up to 300 mm wafer size. System deposits thick Al layers at rates >1.4 µm/min without any yield destroying whiskers or extrusions. It also carries thin wafer handling hardware and uses film deposition stress control to maximize throughput with minimal wafer bow.



Original Press Release:



SPTS Announce Sigma fxP PVD for 300 mm Power Device Manufacturing



Next generation system ready for power devices transitioning to large wafer formats



NEWPORT, England -- SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, today announced the launch of its Sigma fxP physical vapor deposition (PVD) system for 300mm power device manufacturing. Available system options include modules for frontside thick aluminum processing and backside metal deposition on ultra-thin wafers. The new system is designed to address the technical challenges customers face as they scale power PVD processes up to 300 mm wafer size.



In a discrete MOSFET power device, current passes through the silicon substrate so electrical contacts are required on both sides of the wafer. Due to the high currents involved, thick aluminum alloy layers are deposited on the frontside of the wafer (typically > 4 microm rather than <1 microm for mainstream silicon interconnects). However, depositing thick films puts unusually large heat loads on process chamber hardware, potentially resulting in film contamination from outgassing chamber furniture. This contamination can lead to the formation of aluminum whiskers/extrusions in the growing film that can ultimately result in device killer defects. In traditional front end fab deposition equipment, a common technique to mitigate this issue is to reduce film deposition rates with a corresponding reduction on system productivity. However, the Sigma fxP design overcomes that challenge without compromising throughput. Sigma fxP users routinely deposit thick Al layers at rates >1.4 microm/min without any yield destroying whiskers or extrusions.



With frontside processing complete, wafers are thinned down to 50 microm or less to reduce 'on-state' resistance and solder metal layers are deposited on the backside. No supporting carrier substrates are used and the ultra-thin, large area wafer will deform under the influence of uncontrolled film stresses, with miss-handling a potential consequence. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow.



Currently, seven out of the top ten power device manufacturers, and all major foundries use the Sigma fxP as the process tool of record for power PVD processing. With power device manufacturing moving to 300mm format wafers, SPTS has successfully transferred its market leading process knowledge and capability to the new platform.



"We are pleased to offer customers a complete solution for 300 mm Power PVD processing," said Chris Jones, product marketing manager at SPTS. "Sigma fxP systems are in full production for frontside thick Al and thin wafer backside processing. We are prepared to support the IDMs and foundries as they make the transition from 150 and 200mm wafer formats to 300mm."



About SPTS Technologies



SPTS Technologies (a Bridgepoint portfolio company) designs, manufactures, sells, and supports etch, PVD, CVD and thermal wafer processing solutions for the MEMS, advanced packaging, LEDs, high speed RF on GaAs, and power management device markets. With manufacturing facilities in Newport, Wales, Allentown, Pennsylvania, and San Jose, California, the company operates across 19 countries in Europe, North America and Asia-Pacific. For more information about SPTS Technologies, please visit http://www.spts.com



CONTACT: Company Contact: Evelyn Tay, Tel: +44(0)7885-70-6565, Evelyn.Tay@spts.com

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