Miniature Piezo Hexapod provides dynamic error correction.
Press Release Summary:
With 1,500 g load capacity, 6-axis Model P-915KWEF is designed for dynamic error correction for 6° of freedom. Capacitance direct metrology sensors and parallel-kinematic design with piezo actuator direct drives result in compact and stiff positioning solution. Product provides 1 nm linear resolution, 0.07 µrad angular resolution, and positioning range up to 70 µm. Mounted inside rotary stages, Model P-915KWEF virtually eliminates wobble and eccentricity errors.
Original Press Release:
PI's Miniature 6-Axis Piezo Hexapod for Dynamic Active Error Compensation
PI’s Miniature Piezo Hexapod, P-915KWEF
Auburn, MA – PI (Physik Instrumente) L.P., a leader and solution provider in motion control and positioning components and systems, introduces a miniature hexapod, designed for dynamic error correction in all three linear and rotation axes. The P-915KWEF joins PI‘s hexapod portfolio of over 100 products from palm-sized units to high-load systems capable of positioning several tons with sub-micron precision.
Compact & Stiff
With a load capacity of 1500g, this miniature hexapod was designed for dynamic error correction for six degrees of freedom. The parallel-kinematic design with piezo actuator direct drives results in a very compact and stiff positioning solution, compared to conventional multi-axis designs. It is easily mounted inside rotary stages to virtually eliminate wobble and eccentricity errors and can be adapted to other long travel positioning systems for improved multi-axis motion accuracy.
More Information, Specifications and Datasheet:
http://www.pi-usa.us/products/Micropositioning_Stage_Hexapod/hexapod-6-axis-stage.php#P915K
Capacitance direct metrology sensors provide absolute, sub-nanometer precision position feedback with high bandwidth. The stiff, frictionless flexure design enables exceptional responsiveness and accuracy.
Applications of the P-915KWEF
Dynamic optimization of axial runout, eccentricity and evenness of rotation stages, vibration insulation, fine adjustment, used in mechanical manufacturing, machining processes.
Features & Advantages
• Very Stiff Design, 1kHz Natural Frequency, High Dynamics
• 6 Axis System: XYZ, Pitch, Yaw, Roll
• 1 Nanometer Linear Resolution, 0.07µrad Angular Resolution
• Positioning Range up to 70µm
• Absolute Measuring, Direct Metrology Capacitance Sensors for Closed-Loop Operation
• Space-Saving, Parallel-Kinematics Design for Easy Integration
• Wear-Free Piezo Drives, Operate in Strong Magnetic Fields / High Vacuum
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About PI
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 850.