Miniature Piezo Hexapod provides dynamic error correction.

Press Release Summary:



With 1,500 g load capacity, 6-axis Model P-915KWEF is designed for dynamic error correction for 6° of freedom. Capacitance direct metrology sensors and parallel-kinematic design with piezo actuator direct drives result in compact and stiff positioning solution. Product provides 1 nm linear resolution, 0.07 µrad angular resolution, and positioning range up to 70 µm. Mounted inside rotary stages, Model P-915KWEF virtually eliminates wobble and eccentricity errors.



Original Press Release:



PI's Miniature 6-Axis Piezo Hexapod for Dynamic Active Error Compensation



PI’s Miniature Piezo Hexapod, P-915KWEF



Auburn, MA – PI (Physik Instrumente) L.P., a leader and solution provider in motion control and positioning components and systems, introduces a miniature hexapod, designed for dynamic error correction in all three linear and rotation axes. The P-915KWEF joins PI‘s hexapod portfolio of over 100 products from palm-sized units to high-load systems capable of positioning several tons with sub-micron precision.



Compact & Stiff

With a load capacity of 1500g, this miniature hexapod was designed for dynamic error correction for six degrees of freedom. The parallel-kinematic design with piezo actuator direct drives results in a very compact and stiff positioning solution, compared to conventional multi-axis designs. It is easily mounted inside rotary stages to virtually eliminate wobble and eccentricity errors and can be adapted to other long travel positioning systems for improved multi-axis motion accuracy.



More Information, Specifications and Datasheet:

http://www.pi-usa.us/products/Micropositioning_Stage_Hexapod/hexapod-6-axis-stage.php#P915K



Capacitance direct metrology sensors provide absolute, sub-nanometer precision position feedback with high bandwidth. The stiff, frictionless flexure design enables exceptional responsiveness and accuracy.



Applications of the P-915KWEF

Dynamic optimization of axial runout, eccentricity and evenness of rotation stages, vibration insulation, fine adjustment, used in mechanical manufacturing, machining processes.



Features & Advantages

• Very Stiff Design, 1kHz Natural Frequency, High Dynamics

• 6 Axis System: XYZ, Pitch, Yaw, Roll

• 1 Nanometer Linear Resolution, 0.07µrad Angular Resolution

• Positioning Range up to 70µm

• Absolute Measuring, Direct Metrology Capacitance Sensors for Closed-Loop Operation

• Space-Saving, Parallel-Kinematics Design for Easy Integration

• Wear-Free Piezo Drives, Operate in Strong Magnetic Fields / High Vacuum



USA / Canada

http://www.pi-usa.us  

info@pi-usa.us

East

(508) 832-3456

Midwest

(508) 832-3456

West 

(949) 679-9191 (LA Area & Mexico)

(408) 533-0973 (Silicon Valley/Bay Area)



About PI

PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 850.

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