Gas Abatement Solution aids in semiconductor processing.
Press Release Summary:
Based on inward-fired combustion technology, HELIOS 6(TM) gas abatement solution has head design with 6 inlets for process gases and one inlet for gas box purges or other ancillary operations. Unit does not require compressed air and can reduce hydrogen concentrations below lower explosive limit (LEL) in flows as high as 200 slm. Applications include high hydrogen flow processes, such as Si and SiGe epitaxy, LPCVD tungsten, and compound semiconductor MOCVD.
Original Press Release:
BOC Edwards Introduces HELIOS 6(TM) Gas Abatement Solution for Semiconductor Processing
WILMINGTON, MASS. (30 May 2007)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today the release of the HELIOS 6(TM) gas abatement solution, the latest addition to its HELIOS(TM) exhaust gas abatement product line for high hydrogen flow processes, such as Si and SiGe epitaxy, LPCVD tungsten and compound semiconductor MOCVD. With six inlets for process gases, plus an additional inlet for gas box purges or other ancillary operations, the Helios 6 gas abatement solution is based on BOC Edwards' unique inward-fired combustion technology, delivering unprecedented abatement performance at the lowest cost of ownership.
"HELIOS 6 gas abatement solution extends the capability of our HELIOS product line to accommodate higher flow levels and more gas inlets, substantially lowering the overall cost of ownership," said Peter Holland, regional business manager, BOC Edwards. "High fuel efficiency and no requirement for compressed air contribute additional cost savings when compared to alternative technologies, while our unique combustor is designed to reduce the hydrogen content to safe levels even at the highest flow rates."
Both the HELIOS product line, and the proprietary inward-fired combustor technology that it incorporates, are well-established industry standards. BOC Edwards has installed hundreds of HELIOS systems and thousands of combustors worldwide. The new HELIOS 6 gas abatement solution, which can reduce hydrogen concentrations below the lower explosive limit (LEL) in flows as high as 200 slm, is available now on the standard HELIOS platform. The six inlet head design will also be available on BOC Edwards' line of ATLAS(TM) gas abatement products in the future.
About BOC Edwards
BOC Edwards is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including semiconductors and flat panel displays. It is also a world leader in vacuum technology for industrial, scientific, process, and R&D applications. BOC Edwards employs around 4,000 people globally, in the design, manufacture and support of high technology vacuum equipment. BOC Edwards invented the concept of the commercial oil-free 'dry' vacuum pump and now supplements this with a wide range of other pumping technologies as well as related products and services.
