Product News: Machinery & Machining Tools
Deposition System processes 6 in. dia or smaller wafers.
Press Release Summary:
August 10, 2007 - Able to process up to 100 wafers, EasyTube 6000 Chemical Vapor Deposition system is available with Atmospheric and Low-Pressure Chemical Vapor Deposition processes for research applications in semiconductor, MEM, nanotechnology, and solar cell markets. Multi-tube horizontal system is equipped with WINPRC real-time software to enable optimization of all process parameters and is designed specifically for research, university, and laboratory markets.
Original Press Release
First Nano Ships the First of Our EasyTube 6000 Series Deposition System Specifically Designed for the Research and University Laboratory Market
Press release date: August 2, 2007