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XY Nanopositioning Piezo Stage provides sub-nm resolution.
Press Release Summary:
April 25, 2014 - With footprint less than 3 x 3 in., Model P-763 provides 30 x 30 mm aperture and travel range of 200 x 200 microns. Flexure-guided positioning system is equipped with capacitive, direct-metrology position sensors and ceramic-insulated piezo actuator technology. With capacitive feedback, linearity of motion is optimal, with 0.02% deviation from perfect straight line. Stage is suited for applications such as image-stabilization, micro-lithography, nano-alignment, and surface metrology.
Original Press Release
Affordable High Precision XY Nanopositioning Piezo Stage
Press release date: April 14, 2014
Auburn, MA – PI's P-763 XY nanopositioning stage is a new, more affordable addition to PI's wide range of piezo stage positioners. The compact P-763 flexure-guided stage has a footprint of less than 3x3 inches (70x70mm) while providing a 30x30mm aperture. With a large travel range of 200x200 microns this piezo positioning system is ideal for demanding applications such as image-stabilization, micro-lithography, nano-alignment, surface metrology, super-resolution microscopy and bio-nanotechnology and photonics and datacomm.
More information on the Nanopositioning Stage is available at http://www.nanopositioning.net/P763_Affordable_High-Precision_XY_Nanopositioning_Stage.php
Exceptional reliability is guaranteed by PI's Mars-Rover tested ceramic-insulated piezo actuator technology which proved superior after 100 billion cycles life testing.
This high-performance XY nanopositioner is designed for cost-sensitive applications in OEM and research where very high precision, high throughput and fast step and settle in a few milliseconds are required. Equipped with capacitive, direct-metrology position sensors, the nanopositioning stage is also very well suited to static positioning applications where drift-free long term stability is essential.
Drive Technology and Accuracy
The P-763.22C nanopositioning piezo stage is a multilayer-piezo driven stage, providing sub-nanometer resolution and rapid response for fast step and settle or high speed scanning applications. With its capacitive feedback, linearity of motion is exceptional, with only 0.02% deviation from a perfect straight line, when tested on a laser interferometer.
Controllers and Software
A variety OEM and bench top controllers are available to suit the user’s budget and application and each PI piezo controller comes with a wealth of software tools and programming examples. PI’s E-725 advanced digital-servo controller, for example provides up to 3 motion channels with 24 bit resolution and ultra-low noise DAC converters for excellent closed-loop performance. All motion and servo parameters can be user-optimized on the fly. A variety of digital and analog interfaces are integrated, communication interfaces via Ethernet, USB and RS-232 are available.
PI is a leading manufacturer of precision motion control equipment, piezo systems, piezo motors and actuators for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with ten subsidiaries, R&D / engineering on 3 continents and total staff of 750+