X-Ray Tool detects defects in semiconductor wafers.
June 2, 2005 - Digital X-ray inspection tool, BedeScanâ„¢, is used for identification and quantification of structural defects in semiconductor wafer substrates and epilayers up to 300 mm in diameter. Defect mapping tool uses non-destructive X-ray diffraction to identify anomalies in incoming and processed wafers and delivers quantitative data that enables in-line statistical control of manufacturing processes. Imaging of wafers is possible in reflection and transmission modes.
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Original Press release
Bede
Belmont Business Park
Durham, , DH1 1TW
United Kingdom
Bede Announces BedeScanâ„¢ for Structural Defect Detection in Semiconductor Wafers
DURHAM, UK – Bede announces the BedeScan™ digital X-ray inspection tool for high-speed identification and quantification of structural defects in semiconductor wafer substrates and epilayers up to 300mm in diameter. A revolutionary defect mapping tool, BedeScan uses non-destructive X-ray diffraction (XRD) to identify a wide range of anomalies in both incoming and processed wafers, including thermal slip dislocations, edge damage, and other crystallographic defects.
BedeScan increases yield and cost savings in the semiconductor manufacturing process by identifying and quantifying defective material at early processing stages. It is ideal for high-volume manufacturing applications, delivering quantitative data that enables in-line statistical control of manufacturing processes. BedeScan offers the same crystalline defect detection as non-automated, film-based instruments traditionally confined to research and development labs.
A versatile tool, BedeScan allows for imaging of wafers in both reflection and transmission modes, providing information about crystallographic defects in the surface region and bulk of wafers. Digital image processing permits efficient measurement routines of selected regions only, avoiding unnecessary measurement of traditionally perfect areas. Its user-friendly software offers customizable speed, resolution, and scanning range.
Bede is the global leader in non-destructive X-ray metrology tools for the semiconductor industry.
Bede was founded in 1978 and is headquartered in Durham, UK. The company has sales and service offices in Denver, Colorado (USA) and Shanghai, China, as well as a global network of distributors. In Prague, Czech Republic, Reflex sro operates as a subsidiary of Bede and provides specialist X-ray technology to the Bede Group.
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