X-Ray Diffraction System provides LED quality control.February 5, 2010 -
Designed to control production quality at LED and compound semiconductors fabs, QC3(TM) High Resolution X-Ray Diffraction System provides symmetric and asymmetric measurements for all common semiconductor wafers, such as GaAs, InP, Si, and GaN. Skew symmetric measurements are also possible on same hardware to allow additional capability for GaN wafers. These reflections allow thickness, composition, relaxation, and strain of multi-layer structures to be determined.
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Original Press release
Jordan Valley Semiconductors, Inc.
8601 Cross Park Dr.
Austin, TX, 78754-4578
USA
Jordan Valley Semiconductors (JVS) Targets Quality Control in LED and Compound Semiconductor Manufacturing
The Company Launches the QC3(TM), a High Resolution XRD (X-Ray Diffraction) System for the LED and Compound Semiconductors Manufacturing Process Quality Control
DURHAM, England and MIGDAL HAEMEK, Israel, -- Jordan Valley Semiconductors Ltd. (JVS), the market leader in X-ray metrology tools, has introduced today the QC3(TM), a High Resolution XRD (HRXRD) system which controls production quality at LED and compound semiconductors fabs.
JVS continues to evolve the company's HRXRD product line, which it acquired from Bede in 2008, with the addition of the new tool. The QC3(TM) HRXRD (High Resolution X-Ray Diffraction) system was developed on the basis of Bede's industry-proven QC200(TM) and D1(TM) systems. The new system improves hardware performance for higher productivity and system reliability, and reduces both cost of ownership and system price by tailoring the functionality to the specific needs of its customers. These improvements are achieved through the optimization of both the hardware and software.
Isaac Mazor, JVS's President and CEO, said: "The new QC3(TM) HRXRD production tool demonstrates JVS's commitment to LED manufacturing metrology solutions that meet and exceed our customers' technical and cost of ownership expectations."
"The tool has been built with our customers' needs in mind. Customers are looking for accuracy, repeatability, low cost of operations, ease of service and excellent price/performance - and our QC3(TM) system delivers all of these requirements," added Mr. Mazor.
Dr. Paul Ryan, Corporate VP and UK site manager, said: "By optimizing the configuration to the specific market segment needs, the QC3 meets our customers' process technology needs at outstanding price/performance ratio. With our field proven and popular control and analysis software tools, such as RADS, our customers enjoy the ease of operation with outstanding accuracy and repeatability that are key for today's demanding compound semiconductors process control tasks."
For additional information, application notes and sales contact information, please visit our web site at http://www.jvsemi.com.
Technical description:
The QC3(TM) has been configured to provide symmetric and asymmetric measurements for all common semiconductor wafers, such as GaAs, InP, Si, GaN (thick buffers). Additionally, skew symmetric measurements are possible on the same hardware, to allow additional capability for GaN wafers in particular. These reflections allow the thickness, composition, relaxation and strain of multi-layer structures to be determined. Custom sample plates can be defined with locations for multiple wafers, along with large translation ranges, in order to maximize productivity by loading batches of wafers at once into the tool. By using Jordan Valley's extensive knowledge of in-line metrology, the full measurement cycle can be automated for multiple wafers within a batch with results reported to the factory. The analysis is performed through RADS, the oldest and still the best HRXRD analysis package, which has been proven in industry and academic institutions alike.
About Jordan Valley Semiconductors
Jordan Valley Semiconductors, Ltd. is the leader in X-ray metrology solutions for advanced semiconductor fabs. The company's products are used by leading semiconductor manufacturers worldwide. Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE:CII), Intel Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (NASDAQ:ELRN).
The company offers a comprehensive family of solutions based on advanced X-Ray Reflectivity (XRR), X-Ray Fluorescence (XRF), and High Resolution X-Ray Diffractometry (HRXRD). These tools are fully automated, production ready and ideal for both blanket and patterned wafers.
About Jordan Valley Semiconductors UK Ltd.
Jordan Valley Semiconductors UK was formed from the acquisition of Bede Scientific Instruments Ltd. by Jordan Valley in 2008. Jordan Valley Semiconductors UK is the leader in the production of solutions for High Resolution X-ray Diffraction for Epi film characterization, with a long history in products for both the Si and the compound semiconductor markets. The company's solutions allow the control of Epi processes for a wide range of products.
R&D and manufacturing of the D1 and QC3 products are based in Durham, UK.
With worldwide sales and support offices in Israel, US, Taiwan, China, Korea, Japan and other locations.
Press Contact: Alon Kapel, Jordan Valley Semiconductors Ltd., Tel: +972-4-6543666, Email: alon@jordanvalley.com
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