Wafer Loaders provide throughput of 750 wph.April 3, 2007 -
Compatible with Class 1 cleanrooms, semi-automatic WL150 and WL200 Series handle 3-6 in. and 5-8 in. wafer sizes, respectively. Systems feature smart stepper motors for drive axis, stall and fault detection, linear stages for smooth action, and vacuum touch end effectors with sensing capabilities. Offering user-defined inspection positions, devices include intuitive HMI control box and numeric keypad, and VESA interface for integration with microscopes, optics and inspection devices.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
McBain Instruments, Inc.
9601 Variel Ave.
Chatsworth, CA, 91311
USA
McBain Instruments Introduces New Wafer Loader for Microscopy
March 13, 2007 - Chatsworth, CA - McBain Instruments, a leading supplier of research, inspection and laboratory microscopes, microscopy systems and custom engineering design services, announces a newly designed lab tool, the Wafer Handler WL150 and WL200 Series. The innovative semi-automatic wafer inspection device offers high throughput at 750 WPH with smooth, reliable and safe handling of wafers up to 200mm. The new, portable apparatus is an updated and upgraded system that replaces the "Ultrastation" wafer handling system, no longer available from Irvine Optical.
Economical and compact, McBain Instruments' new wafer cassettes accommodate either 3" - 6" (WL150) or 5"- 8" (WL200) wafer sizes. The Class 1 clean room-compatible Wafer Handler also features "smart" stepper motors for the drive axis, motors that provide stall and fault detection, linear stages for smooth and repeatable action and vacuum touch end effectors with sensing capabilities. The easy-to-mount device facilitates safer wafer handling with user-defined inspection positions and a strategic spring-loaded counterbalance to support the majority of the load without overloading the Z-axis mechanism.
The standard VESA interface makes integration seamless with virtually all major microscopes, optics and inspection devices. The complete system is provided with an intuitive HMI (Human Machine Interface) control box and numeric keypad. Ideal for labs and automated work station tasks that require reliable and safe wafer handling and loading. In full production and shipping now, McBain's Wafer Handler modules are available with an exceptional 12-month parts and labor warranty.
McBain Instruments, founded in 1965, provides innovative microscopy systems and custom-integrated imaging solutions to the industrial, biomedical, and R&D communities. The company's pioneering technical expertise has made McBain a leader in integrating advanced imaging technology. Products include NIR wafer inspection and measurement tools, precision X-Y-Z stages, ergonomic measuring and assembly stations, metrology tools, wafer handlers, and real-time confocal systems. McBain is the exclusive Southwestern Regional Industrial Dealer for Leica Microsystems and a distributor of Yokogawa's line of real-time confocal systems. For more information, please visit www.mcbaininstruments.com.
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