Vibration Cancellation Floor stabilizes SEMs.
June 10, 2009 -
Designed for use with scanning electron microscopes (SEMs), STACIS® FP active hard-mount vibration cancellation floor platform features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich 4 isolators and digital controller. Measuring 7 in. tall, it weighs less than 400 lb and can support up to 2,500 lb. or more with no soft air suspension. With vibration cancellation starting below 1 Hz, platform is available with 3 or 6 degrees of freedom.
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Original Press release
Technical Manufacturing Corp.
15 Centennial Dr.
Peabody, MA, 01960
USA
TMC Introduces STACIS® FP Active Hard-Mount Vibration Cancellation Floor Platform for SEMs
PEABODY, Massachusetts (May 26, 2009) - Technical Manufacturing Corporation (TMC) will introduce its STACIS® FP active vibration cancellation floor platform system designed for use with scanning electron microscopes (SEMs) at SEMICON West 2009 in San Francisco, July 14-16.
The STACIS® FP features sub-Hz vibration cancellation in an active hard-mount floor platform that fits most commercial SEMs. SEMs are among the most vibration sensitive tools made, and these precision instruments typically incorporate an internal vibration isolation system. STACIS® FP is compatible with all internal SEM vibration isolation systems.
"STACIS® FP is a compact, cost-effective alternative to our patented STACIS® active vibration cancellation," said Steve Ryan, TMC vice president, marketing. "It incorporates STACIS technology but has a much smaller footprint and installs easily with minimal tuning. Simply put the SEM on the platform, power up, and you're done."
With vibration cancellation starting below 1 Hz, STACIS® FP features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC's DC 2000 digital controller. The system is only 7 inches tall, measures 3" x 40", weighs less than 400 pounds, and can support 2,500 pounds or more with no soft air suspension. It is available with three or six degrees of freedom.
TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2000-certified company's products include active and passive vibration isolation systems; optical tops, optical table systems, and breadboards; laboratory tables and table top platforms; floor platforms; magnetic cancellation and electric field shielding systems; and acoustic enclosures.
techmfg.com/products/floorplatforms/Stacis_FP.html
STACIS is a registered trademark of Technical Manufacturing Corporation.
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