Vacuum Seals target semiconductor industry.
July 18, 2006 -
Utilizing magnetic force to maintain magnetic fluid in specific position around shaft, Magnetic Fluid Vacuum Seals provide liquid sealing barrier to fluids and gases. Low friction hermetic seal allows minimal contamination. Effective in temperatures up to 200°C, seals offer peripheral velocity up to 1.0 m/sec, as well as thermal and high vacuum resistance. Semiconductor applications include deposition, ashing, plasma etch, metallization, and ion implant.
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Original Press release
Simrit, A Div. Of Freudenberg-NOK
47690 E. Anchor Ct.
Plymouth, MI, 48170
USA
Simrit Introduces Magnetic Fluid Vacuum Seals for Semiconductor Industry
Simrit to debut high-performance seals at SEMICON West 2006
SAN FRANCISCO, July 11, 2006 - Simrit, the industrial sealing products division of Freudenberg-NOK, has introduced its line of magnetic fluid vacuum seals specifically developed for high-performance, low-friction, rotary seal applications within the semiconductor industry. The new vacuum seals are on display this week during SEMICON West 2006 (booth #3606).
"We are thrilled to introduce our new cutting-edge product to the semiconductor industry," said Vinay Nilkanth, vice president of business development for Simrit. "Our magnetic fluid vacuum seals, like all Simrit products, are backed by our best-in-class material development, product design and manufacturing capabilities."
Used on semiconductor manufacturing equipment, the Simrit magnetic fluid vacuum seal design utilizes magnetic force to maintain the magnetic fluid in a specific position around the shaft, which provides a liquid sealing barrier to fluids and gases. This method results in a very low friction hermetic seal, which allows very minimal contamination, while adding durability and extended life.
Simrit's magnetic fluid vacuum seals, effective in temperatures up to 200 degrees Celsius, offer low vapor pressure and small gas generation, peripheral velocity up to 1.0 m/sec and excellent thermal and high vacuum resistance.
Simrit's magnetic fluid vacuum seals provide superior performance in a variety of semiconductor applications, including: deposition - LPCVD, APCVD, HDPCVD, PECVD, RPCVD and SACVD; ashing; plasma etch - poly, oxide and metal; metallization - PVD; and ion implant. A range of magnetic fluid types can be used with differing viscosities and outgas and leak rates to cover a wide spectrum of applications.
Magnetic Fluid Seals:
Standard catalog or custom designs
Simple axial, multi-axial, and linear translating designs
Excellent high temperature capabilities
Low vapor pressure
High corrosion resistance designs available
Proprietary magnetic fluid and bearing lubrication
Compact designs to minimize space requirements
The Simrit Division is based at Freudenberg-NOK's headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $7 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-molded products for the aerospace, appliance, automotive, marine, medical, off-highway equipment, recreational vehicle and semiconductor markets.
For more information, visit the Simrit website at www.simrit.com.
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