Vacuum Pumps are optimized for performance/footprint density.
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Press Release Summary:
Intended for solar, glass coating, semiconductor, and LCD etch applications, STP-iXA2206/iXA3306 magnetically levitated turbomolecular pumps have onboard controller and standard connection cable between pump and control. STP-iXA3306 has max pumping speed of 3,200 Lps, while STP-iXA2206 features power supply incorporated into onboard controller as well as temperature management system option. Five-axis magnetic bearing system, motor, and drive system help extend equipment life.
Original Press Release:
Edwards Expands iXA Vacuum Pump Family with the Introduction of the STP-iXA2206 and iXA3306
New fully-integrated pumps feature superior performance and reduced footprint
CRAWLEY, WEST SUSSEX, UK. -Edwards, a leading global supplier of vacuum and abatement equipment and services, today expanded its iXA family of magnetically-levitated turbomolecular pumps with the introduction of the STP-iXA2206 and STP-iXA3306 pumps. Developed for solar, glass coating, semiconductor and LCD etch applications, the iXA2206/iXA3306 pumps deliver best-in-class performance superior to that offered by earlier iXA family pumps.
"The new STP-iXA2206/iXA3306 are fully-integrated vacuum pumps that are easy to install and offer a small footprint as an all-in-one solution for all application tools," said Masahide Tanaka, senior product manager, TMP Business Division, Edwards Japan, Ltd. "The integration of the onboard controller eliminates the need for control unit rack mounting and a connection cable between the pump and the control unit, saving installation time, space and cost. Its compact design and size compatibility with previous models simplifies upgrades from existing pumps."
The STP-iXA3306 offers industry-leading pumping performance. It has a maximum pumping speed of 3200 liters per second and improved throughput performance at high gas flows.
The STP-iXA2206 offers the same pumping speed of the earlier STP-A2203, yet the maximum throughput capability has been increased. It features the latest-generation small power supply, which has been incorporated into the popular onboard controller first introduced with the STP-iXA2205 pump. It also includes a temperature management system option to minimize the formation of process-generated byproducts. The pump's five-axis magnetic bearing system and new motor and drive system ensure long life and low operating costs with maintenance intervals as long as five years.
The STP-iXA Series will be showcased at the Edwards booth 4C-704 during SEMICON® Japan, taking place December 1-3, 2010 at Makuhari Messe, Chiba, Japan.
For further information about Edwards products, please visit: www.edwardsvacuum.com.
About Edwards
Edwards is a leading global supplier of integrated solutions for the manufacture of semiconductors, flat panel displays, LEDs and solar cells and a leader in vacuum technology for industrial, scientific, process and R&D applications. The company employs approximately 3,000 people worldwide in the design, manufacture and support of high technology vacuum and exhaust management equipment. Edwards invented the concept of the low-maintenance, cost-effective, commercial oil-free 'dry' vacuum pump and offers a wide range of other pumping technologies, and related products, supported by an international sales and service organization. For more information, please visit www.edwardsvacuum.com.
Edwards and the Edwards logo are registered trademarks of Edwards Limited.
